MY1

MY1B MY1M Stroke Adjustment Unit Specifications MY1C MY1H 16 20 25 32 40 50 63 Bore size (mm) L A L A L A L A L A L A L Unit symbol A MY1 HT RB 0806 + with adjustment bolt RB 0806 + with adjustment bolt RB 1007 + with adjustment bolt RB 1412 + with adjustment bolt RB 1412 + with adjustment bolt RB 2015 + with adjustment bolt RB 2015 + with adjustment bolt With adjustment bolt With adjustment

CXS

Symmetric mounting Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

CXS

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Digital Flow Switches, Series PF2A, Series PF2W

Fixed SI unit (l/min, or l, m3 or m3 x 103) will be set for switches without the unit switching function. Output (OUT1) Indicator Lights up when OUT1 is ON. Blinks when an overcurrent error occurs on OUT1. DOWN Button ( Button) Use this button to decrease a set value. UP Button ( Button) MODE Button ( Button) Use this button to increase a set value. Use this button to change a function.

Compact Guide Cylinder

[mm] Stroke [mm] 22 MGPK Series Operating Range when Used as a Stopper Bore Sizes 12 to 25 / MGPKFM12 to 25 (Slide bearing) MGPKFM12 to 25 (Slide bearing) L 50 mm L 50 mm 100 m m 25 50 40 20 Mass of transferred object: m [kg] 30 16 20 12 10 When selecting a model with a longer L dimension, be sure to choose a bore size which is sufficiently large. 4 5 Caution 3 Handling Precautions

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MX A 3.0 25 L MTS A 5.0 32 L MY A 12 40 L CY A 12 50 L MG A 24 63 L CX Adjusting bolt lock nut Unit holding bolt Loosen the adjusting bolt lock nut, and adjust the stroke from the lock plate side using a hexagon wrench. Retighten the lock nut.

JIS Standard Hydraulic Cylinder

MM CHS C D E e CH2 CH2 10 f l CHA Air release +0.4 +0.1 SS + Q + l + Stroke W W CX U NA T NB Related Products L K F S + Stroke MA ZZ + Q + l + Stroke B Width across flats G RR SS + Stroke A ZZ + Stroke D(mm) With rod boot Stroke range (mm) Bore size (mm) J e CX B C F GA GB NA NB P R S T CD RR SS L U W l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 M10 x 1.25 25 to 1400 58 38 16 32 15 37 31

PFxx-OMS0001CN

Rc NPT 160 g 240 g G 170 g 245 g +80 g +25 g +30 g -67No.PF-OMS0001CN-A 1()10024 551005009.5 221002003.8 2OUT 30()90% ON(OFF) 4 5 60()90% 7 8 9 M8 ZS-40-A AWG23 0.7 mm PVC 1.1 mm PVC 4 -68No.PF-OMS0001CN-A A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min PFMC7501(500 L/min) PFMC7102(1000 L/min) kPa

CJ2

CJ2W L A 16 45 Without auto switch Example Rail mounting style CDJ2WB16-60-A Band mounting style CDJ2WB10-45-B CDJ2W L A 16 45 J79W With auto switch For rail mounting style, screws and nuts for 2 pcs. switches come with the rail. Number of auto switches Built-in magnet Auto switch For the applicable auto switch model, refer to the table below.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

L L A A L A L A L A L L A Unit symbol DRB 0806 with adjusting bolt RB 0806 with adjusting bolt RB 1007 with adjusting bolt RB 1412 with adjusting bolt RB 1412 with adjusting bolt RB 2015 with adjusting bolt RB 2015 with adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt Configuration Shock

Title not found

Ground wire Ground wire Ground wire Mounting direction DIN rail Mounting direction A DIN rail mounting adapter Hook the controller on the DIN rail and press the lever of section A in the arrow direction to lock it. L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

Table of Contents

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

Pin Clamp Cylinders

KU32 Series 32 How to Order Clamping height LOW type KU L 32 075 R A L P3DWASC C X2321 X2322 C Clamping height HIGH type L H M9BWV 32 075 R A KU Number of auto switches With lock Nil Without lock L With lock Nil 2 pcs.

CL

(mm) 40 50/63 80 100 E1 L1 MM U1 NDH10 NX A1 MM E1 L1 U1 NZ L NX Part No. A R1 Part No.

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary