Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket and set nuts.

Handheld Electrostatic Meter

Ground wire (1.5 m) Soft case IZH-A-01 IZH-B-01 Option High voltage measuring handle IZH-C-01 -6No.SFOD-OML0002-A Summary of Product parts Names of individual parts Display Sensor -7No.SFOD-OML0002-A Definition and terminology Terms Meaning A Auto power-OFF (function) A function that turns off the power supply automatically when no buttons are pressed for 5 minutes after the power supply

Pressure Gauge Guide

Model (Standard) Model Pressure range (1) VY1 Indication unit Connection thread Note MPa GP46-10-01 to 02 GP46-10-01 to 02L2 GP46-10-01 to 02L5 0 to 1.0 G 1 8 R MPa 1 4 R PPA Note 1) Do not apply pressure more than the maximum display pressure. This will cause a malfunction. Be sure to read the precautions in page 14-11-15 for selection and installation.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

Compact Proportional Solenoid Valve Series PVQ

Stroke P (1) A (2) P (1) A (2) PVQ30 PVQ10 P (1) A (2) Proportional Solenoid Valve Conventional (2 port valve) One 2-port valve is required for each flow rate. 2 port valve Flow rate can be controlled smoothly with one proportional solenoid valve by current control. Controller mA Smaller Greater Proportional solenoid valve 684 Applications Air-blow !

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Do not use in a line where a pressurized condition is maintained since the body may be damaged. Warning Caution 1. Tubing attachment/detachment for one-touch fittings 1) Installing of tubing (1) Use tubing with no flaws on its periphery and cut it off at a right angle. When cutting the tubing, use a tube cutter, TK-1, 2 or 3. Do not use pinchers, nippers or scissors, etc.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

TA301

A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.

SRP

N2 gas Packaging Clean gas filter Class 10,000 Class 10,000 Features 1 Precision Clean Regulator Series SRP How to Order SRP 1 R 1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with

SRP

N2 gas Packaging Clean gas filter Class 10,000 Class 10,000 Features 1 Precision Clean Regulator Series SRP How to Order SRP 1 R 1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Manifold Regulator ARM1000/2000 Series

Connecting thread IN 1 OUT 2 2 OUT 01 male thread, M5 female thread 8 1 Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

AMR3000 to 6000

AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131 161 51 61 66 81 28 37 37 44 32 40 48 56 3.2 3.2 4.5 4.5 37 37 42 42 21.5 18 16 18.5 182 215 281 325 144 166 188 230 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter assembly installation procedure Accessory/Compact pressure switch: IS1000-01 (Refer to page 3.10-1 for further information