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Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P Load impedance Resistance of the load that impedes the current flow. Panel mounting To allow a product to be mounted on a panel in an appealing and secure fashion.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set

ZSE1/ISE1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZM ejector system.

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .7 CFM / 20 LPM , .7 CFM / 20 LPM, Max Pressure: 20 PSIG / 1.4 bar , 20 PSIG / 1.4 bar, Max Vacuum: 22.4 in HgV / -760 mbar , 22.4 in HgV / -760 mbar, Voltage: (60 Hz) 230 / (50 Hz) 220 - 230 , (60 Hz) 230 / (50 Hz) 220 - 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions:

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

The 220 VAC and 230 VAC are interchangeable as well. *2 The allowable voltage fluctuation is 15% to +5% of the rated voltage for the 115 VAC or 230 VAC.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air Filter No.2 No.2 Mist Separator Series AM Cases that require air removed with moisture, dust or oil, though air is not dried Industrial machinery (metal seals of drivers) 1 mg/m3 (ANR) Series AM Auto Drain AD402 Humidity 100% 0.3 m Oil odor Mist

Electric Slide Table / High Precision Type 《 AC servo motor 》

(Equivalent lead (8)Cable length * [m] (7)Cable type (9)Driver type Power supply Without cable Nil Without cable Nil Compatible drivers voltage [V] Standard cable 3 3 S R Nil Without driver Robotic cable (Flexible cable) 5 5 200 to 230 200 to 230 M2 LECYM2-V A 10 U2 LECYU2-V C 20 * The length of the motor and encoder cables are the same.

Switches

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification. Auto Switch Specifications Auto switch part no.

VZA200/400

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Type of actuation Port size Pilot port size b Cv b C [dm3/(sbar)] Valve model Pilot VHS Body ported Body ported Base mounted Base mounted (With sub-plate) VZA212

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VT VP 3 1 AC DC VG Rated voltage Allowable voltage range Coil insulation Inrush Holding Power consumption DC VP Double solenoid 2 Electrical entry S070 Apparent power AC (Power consumption) VQ Grommet, Grommet terminal, Conduit terminal, DIN terminal

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

38 6.5 118 90 36 34 35.5 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 80 125 22H9 38 6.5 140 112 42 34 35.5 35 27 19 16 M14 x 2 27 55 34 M27 x 2 35 32 1/2 77 26 137 80 160 25H9 42 9 174 140 55 43 45 38 36 22 18 M16 x 2 28 65 38 M33 x 2 40 36 3/4 94 30 155 100 (mm) Without rod boot With rod boot Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maintenance Caution Tube deformation ratio at the minimum bending radius = LD 2d 1 x 100 1.

ISG

5 Wiring Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning 1. Do not have the internal wiring attached to the connection lever for switch operation. It may malfunction.

ZSP1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX ejector system.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Orifice dia. 4.4 8 10 Body class 2 3 4 2 3 4 Port B (OUT) different dia. size Symbol Nil Application Port A & B same size Different diameter tubing can be selected within the same body class. Refer to the applicable tubing table to the left.

TL/TIL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bundle 100 m 50 Ft. (16 m) 100 Ft. (33 m) 2 m Straight pipe Color Translucent (color of material) Applicable fluid Please refer to the applicable fluid in page 41.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY 21.5 ZFC201-09 5/16" 50 ZQ Note) Flow rate when initial pressure drop is 3 kPa or less.

ZU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15