PVC Quick Drain Valve

(Caustic soda) Concentration 50% or less Nitrogen gas Ultrapure water Sulfuric acid (except fuming sulfuric acid) Note 2) Concentration 30% or less Phosphoric acid Concentration 50% or less The material and fluid compatibility check list provides reference values as a guide only.

Dedicated Controller

Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5) VQ56 1 78 or less Rubber seal 75

Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Digital Flow Switch Series PFA For Air Series PFW For Water

Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

Electro-Pneumatic Positioner Series IP8000/8100

122 25% 22.5 MPa 1 E ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 75% G1/2 Electric conduit 35 100% 4 x M8 x 1.25 depth12 Female for rear mounting View A 125 2 x M8 x 1.25 depth12 Female for side mounting 194 With optional resin cable clamp Applicable cable O.

Clean Room Regulator/Fluoro Resin Type Series SRF30

IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Table of Contents - Tubing

Colors indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G T0645 6 4.5 36 T1613 16 13 100 T0604 6 4 24 T1209 12 9 75 T0425 4 2.5 13 T0806 8 6 48 T0403 4 3 25 T1075 10 7.5 60 Model O.D. mm I.D. mm Min. bending radius mm Length 20m 100m Roll Reel Specifications Operating fluid Max. operating pressure Burst pressure Air, Water 218psi

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

LVQ

145 25 141 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

Series 10-MGF ø40, ø63, ø100 Guide Table

Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 10-MGF40 10-MGF63 10-MGF100 1/8 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

poppet valve Air/Inert gas 0.7 MPa 0 MPa/101.2 kPa ON: 4 ms 1, OFF: 2 ms 1 10 to 50C Note 2) Valve specifications Electrical specification Minimum operating pressure / Vacuum Response time Note 1) L plug connector Base mounted L plug connector Body ported Ambient and fluid temperature Lubrication Manual override Impact / Vibration resistance Note 3) Not required Non-locking push type 150/30

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

55.3 22.4 1.2 49.3 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8 19 R 3/8 22.5 24.3 9.8 30 53.7 20.8 1.2 47.4 AS420-N04-SD NPT 1/2 23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 R 1/2 12.4 38.5 27.5 28.5 63.8 26.7 1.2 55.8 Reference thread dimensions after installation. 15-9-91

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)