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ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100

3 Port Solenoid Valve Series VQ100 1

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Uniaxial Electric Actuator Series LJ1

Horizontal Load point distance mm Load point distance mm LJ1H20 LJ1S20 W 50 10 50 10 Horizontal load 100% Horizontal load 50% 5000 10 20 5000 10 20 Amount of deflection m Amount of deflection m 500 1000 2000 500 1000 2000 Lateral load 100% Lateral load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 Load point distance 5 5 Lateral load 100% Lateral load 50%

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 When requiring AC specification of grommet or special voltage, consult SMC. 2.10-4 VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port

JXCx-OMT0005CN

(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10D 20 20 Gripping force N Gripping force N 15 15 Pressure 0.6MPa Pressure 0.6MPa 0.5MPa 0.5MPa 10 10 0.4MPa 0.3MPa 0.4MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm F F MRHQ16D MRHQ16D 50 50 External gripping Pressure 0.6MPa Pressure 0.6MPa 40 40 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 30 0.4MPa 0.3MPa 0.4MPa

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

IDX-OM-Z004

100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02-1994 2 4.1 IDF100150F-W 4 1 IDX-OM-Z004 4 2 pH [25] 6.58.2 6.08.0 6.88.0 (mS/m) [25] 80 30 40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L)

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

LG1H

/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Frame material Aluminum alloy Stainless steel Nil T Specifications Intermediate strokes For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200

Large Bore Compact Cylinder Series CQ2

M36 x 1.5 21 47 50 64 4 Compact Cylinder/ Double Acting: Double Rod Series CQ2W 180, 200 How to Order CQ2WB 180 180 50 50 D D C C Z76 With Auto Switch CDQ2WB With auto switch (built-in magnet) Number of auto switches 2 pcs. Nil S 1 pc. n "n" pcs.

IDX-OM-Y002

time . 4-2 4.7 Signal output . 4-2 Chapter 5 Checks, Maintenance and Adjustment . 5-1 5.1 Daily inspection . 5-1 5.2 Regular maintenance . 5-2 5.2.1 Maintenance for water-cooled condenser . 5-2 5.2.2 Auto Drain Maintenance . 5-6 5.3 Adjustment . 5-8 5.3.1 Capacity Control Valve . 5-8 5.3.2 Sight glass (for IDF240D-3-W only) . 5-8 IDF190D/240D Series IDX-OM-Y002 Contents Chapter 6 Troubleshooting

FQ1

-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-075X11 Note) Seals are not necessary.

VEX1

VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking Retraction locking Variations Bore size (mm) Standard stroke (mm) Locking direction Mounting Series 20 25 30 40 50 75 100 LOCK 32 Extension lock Through hole LOCK 40 RLQ LOCK 50 Retraction lock Both ends tapped 63 Compact Cylinder with Air Cushion and Lock Series RLQ 32, 40, 50, 63 How to Order B 32 50 M F RLQ B 32 50 M F F9BW RDLQ With auto switch Number

VP300/500/700

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate