VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Series MXP Precision Air Slide Table

20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150

1.63

0.1 MGPW MGPW MGPWA25-50 0 0 MGQ 0 80 20 40 60 0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGG Note 1) The guide rod and self-weight for the plate are not included in the above displacement values.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position)

70pvpump

kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) to 100 VDC to 100 VAC 24 to 125 VDC 100 to 250 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less (ZSM1-121) Repeatability 0.05 MPa 0.05 MPa 3% F .S. 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15 kPa or less (ZSM1-115) 0.02 to 0.35 MPa (Without pointer scale) 0.03 to 0.4 MPa (Without pointer scale) Hysteresis (Calibration range of ISG) 0.08 MPa or

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Coolant Valve

A B C D E F H Note) Model 1 4 1 4 VNC81 -65F VNC91 -80F 210 240 305.5 341.5 175 185 204 235 140 150 65 80 387.5 (389.5) 423.5 (425.5) Note) ( ): CE-compliant product (-Q) 623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200

VNC

Air operated LVC (1) (2) (1) (2) LVA Port size Flow characteristics Weight (kg) External pilot solenoid Cv Orifice size (mm) Model Effective area (mm2) 880 1260 1400 1800 1 4 VNC1 VNC12 Flange Note) LVH 12 (P1) 12 (P1) 45 65 56 80 49 70 73 100 VNC814-65F VNC811-65F VNC914-80F VNC911-80F 65 15.7 External pilot solenoid LVD (1) (2) 80 21.2 (1) (2) LVQ Note) The companion flange is JIS B 2210

COQ2BP

~d ~ ~ Part Number 50 Rod End ConfiguraUon CQ2B5o-PS 'j Female thread 63 ~ CQ2863-PS 80 .. ~ CQ2BBO-PS , , Standard Stroke Mounting Bracket Part No [ ~Size(mm) t'I Standard Str'"'!'~~" '~~. 40 25,30,35,40.45,50,75, 100 BoroS.

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100

PFxx-OMO0007CN

(3 m) PF2A7--28--X560 NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T 4 (312 ) 40 g -11No.PF-OMO0007CN (IN ) 1 DC(+) 2 OUT2 3 DC(-) (OUT ) 4 OUT1 INOUT (UP) (SET) (DOWN) LED (OUT1) (OUT2) (OUT1) LED (OUT1) OUT1 ON (OUT2) OUT2 ON (UP) ON/OFF (SET) (DOWN)

PSxx-OMH0002CN

(Full span Full-scale) O PLC DC1224[V] ON-OFF 1 NPN OFF PLC PLC 2 NPN ON PLC PLC ON-OFF ON-OFF NPN PNP 1 NPN OFF ON-OFF PLC DC1224[V] 2 NPN ON R R.D. 1.0005R.D. 1.0005 = 0.05 0.8005R.D. 0.8005 = 0.04 S SUS ON-OFF ON OFF ON-OFF 25[]0 50[]-550[] )3.0[F.S.]25[] 100[kPa] F.S.=100-0=100[kPa] 3.0F.S.=1000.03=3[kPa] 050[] 3[kPa] -10No.PS-OMH0002CN-D () () 25[]ON-OFF )100

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

MXY8 Table deflection mm Table deflection mm Table deflection mm MXY8 DMXY8 MXY6 0.04 MXY6 MXY6 0.03 -X 0.02 0.01 200 Load N 0 20 40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 Data 8-9-9 9 Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is

212

22 80 120 189 C F E Breathing port M5 x 0.8 J Integral ttings/LQ1 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-V07(06) 40 40 49.3 68 20.1 LVR40-V11(10) 82.5 82.5 89 115 33 LVR40-V13(12) 82.5 82.5 89 115 33 LVR50-V19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-V07(06) 8 27 56 77 LVR40-V11(10) 14 64.5 100 140.5 LVR40-V13(12) 14 64.5 100

JXCx-OMT0005CN

20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 TB No.

MXW Series Long Stroke Slide Table

(Unit : lbf) Bore size (mm) Rod diameter (mm) Piston area (in 2) Operating pressure (PSI) Operating direction 22 40 60 80 100 3.43 6.23 9.35 12.5 15.6 0.156 OUT 4 8 Precautions 2.57 4.67 7.01 9.35 11.7 0.117 IN OUT 7.71 14.0 21.0 28.0 35.1 0.351 6 12 (1) The table is supported by precision bearings.

MHS

M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 20 MHSH3 4 1.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110