Series VCL

terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57

Compact Vacuum Unit

(5) (20) (20) 0 0 0 0 0.09 (2.5) 0 0.18 (5) 0.26 (7.5) 0.35 (10) 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87 (0.6) Supply pressure psi (MPa) Suction flow SCFM (L/min (ANR)) 5 Compact Vacuum Unit Series ZB Nozzle Size 0.3 mm Supply Valve, Latching Type/ZB03-Q 1 2 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 72.5 psi (0.5 MPa)) 14.5 14.5 0.35 Suction flow SCFM

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

MQQ

C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10

VXA21/22

Refer to table q for configuration.

High-Precision Digital Pressure Switch

The set value can be copied to up to 10 switches simultaneously.

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

S070

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

Non-contact Gripper

8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5

Compact Cylinder with Lock Series CLQ

CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

1.63

m (kg) 32, 40 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 32, 40 D1 1 10 50 51 100 101 200 10 100 51 50 101 200 -X Stroke (mm) Stroke (mm) 509 MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (25) L = 50 mm, V = 400 mm/s or less (26) L = 100 mm, V = 400 mm/s or less 10 10 25 25 25 25 25 25 Load mass m (kg) Load mass m (kg) 20 20 20 20 20 1 1 20 10 25 26 100

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

(mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5

Series IDG

Inlet air pressure [MPa] Inlet air temperature [C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM Dew point temperature conversion chart 60 0.5MPa 0.7MPa 0.9MPa 50 0.3MPa 40 Atmospheric pressure 0.1MPa Pressurized dew point temperature C 30 20 10 0 10 20 30 40 50 60 50 60 20 10 0 10 20 30 40 30 Atmospheric

V

U B E Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 H O W T O O R D E R ZPR P A D H O R I Z O N TA L T Y P E 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 W I T H B U F F E R ZPR D I M E N S I O N S PA D D I A M E T E R S 40, 50 P A D D I A M E T E R M O U N T I N G T H R E A D 16 16 20 20 25 25 32 32 40 40 50 50 02 2 04 4 06 6 08 8 10 10 13 13 Symbol Thread Dia 2~8 10~16 40~50 20~32 A8 M8X1 Male

Plug-in/Plug Lead: Single Unit

None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0