IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

E-P HYREG

(VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 2 x 4.5 Mounting hole VEXA-18-2A Bracket (Option) Hexagon socket head cap screw M3 L = 8 (2 pcs.)

ZSE30A(F)/ISE30A

x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip included Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included Panel mount adapter + Front protection cover Front protection cover Lead wire with connector Lead wire with connector Mounting screw (with 2

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

15 27 34 SMC 2 Cover dia 1.6 Cross section 0.34mm2 8 3.5 20.5 SYJ Manual override 34 VK M3 X 0.5 External pilot port (Only external pilot style (R)) 2-2.7 Mounting holes 25 10 (C4, C6) (M5) VZ VT 2-M2.5 X 0.45 Thread length 4 9 9.2 VT 30 20 2.1 12.5 VP 2.5 5 5.2 4.1 28 2-3.2 Mounting holes VG 4.5 29.5 10 G(PF)1/16 R port VP Rc(PT)1/8 P port Foot bracket PE port P 1 3 R VQ 14.5 11 2-2.2 Die

COQ2BP

L L N'm J MJ in3 in3 Energy em3 (ee) 0.0610 m3 35.320 0.0283 28.329 1t3 N'm 0.7375 11 Ib 1t3 J 0.7375 It Ib L 0.0353 Power It IbiS hp 9al(U.S.) 3.785 gal (U.S.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

VZ1000-11-1DIN rail 15 Cassette Type Manifold Series SY3000/5000/7000 SY5000 Type 60 D side R P PUSH a DIN rail holding screw R P SMC Replacement parts Part No. Note Description No.

KK/KK13

Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

VKF300

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 11 Series VKF300 Specific Product Precautions Be sure to read before handling. Refer to pages 8 through 11 for safety instructions and precautions. Light/Surge Voltage Suppressor Use of the DIN Connector Manual Override Operation Warning Caution Caution Connection procedure 1.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 10 12 13 17 50.9 15.5 15.2 1.5 3 1.6 9 37.6 23 34 47 46 67 66 87 85 6 11 17 21 30 35 45 51.3 38 11 4 5 5.5 6.5 7 8 8 17 14 19 52.3 39 13 16.2 10 19 17 22 56.6 42 16 18.8 12 22 19 24 59.5 46 18 19.3 Male run tee: KFY Applicable tube (mm) A Effective orifice (mm 2) Weight (g) H1

AMF

(ANR)) 4B 1B B AMF250 AMF650 AMF1000 1 4 0.1 MPa 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) 2B AMF350 AMF800/801 B 3 8 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min

Modular Type Air Filter Series AF

Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Accessory part no. Accessory Applicable model AFD20 AFD30 AFD40 AFD40-06 AFD40 Note 1) Bracket assembly AF20P-050AS AD27 AF30P-050AS AD38 AD38NNote 3) AF40P-050AS AD48 AD48NNote 3) AF40P-070AS AD48 AD48NNote 3) N.O. N.C.

Miniature Guide Rod Cylinder Series MGJ

-M3 x 0.5 (port size) 6.1 + Stroke 8.4 6 9 12 14.5 10 2-M3 x 0.5 through 2-4.3 through Counterbore 8 depth 0.5 25 + Stroke 8 5 19 + Stroke 10.5 + Stroke [ 24.5] 4-M4 x 0.7 depth 5 2-2 through (Guide air release) 6 [ 6.7] 5 32 23 11 23 33 23 3 6 [Auto switch] 2-M3 x 0.5 (Bore size) 8.6 5.4 + Stroke 7.5 10 15 17 4 Series MGJ Auto Switches/Proper Mounting Position for Stroke End Detection B

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Solenoid Valves Flow Characteristics (How to indicate flow characteristics) Conversion of flow coefficient: Av = 28 x 106 Kv = 24 x 106Cv (11) Here, Kv factor: Value of the clean water flow rate represented by the m3/h which runs through the valve at 5 to 40C, when the pressure difference is 1 bar.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

Rotary Gripper Series MRHQ

closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth 3 + 0.025

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (non-locking) 2-Rc(PT) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8