Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

AC

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

Series AC Epoxy Coated F.R.L.

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

CLK1

55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 Note) Refer to pages 13 and 14 for accessories.

Tamper Proof and Flat Head Screw

In-line type AS1001F AS2001F AS2051F AS3001F AS4001F 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 Dual speed controller ASD230F ASD330F ASD430F ASD530F ASD530F ASD630F 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 1/8 1/4 1/4 3/8 1/2 Applicable cylinder bore size (mm) Piping side port size Cylinder side port size Model AS1200 AS2200 AS3200 AS4200 M5 1 2 1/8 1/4 3/8 1/2 3/4 1 1

Clamp Cylinder with Lock Series CLK1

20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

3 Port Solenoid Valve SYJ300/500/700 Series

Non-locking push type With light and surge voltage suppressor 24 VDC 12 VDC M type plug connector Type 20 SYJ500 L type plug connector With light and surge voltage suppressor Non-locking push type N.C. N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1 10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29 28.4 17 KF 17 L1 20.9 12 24 58 46 30.4 22 M D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Speed Controller with One-touch Fitting

) AS22m1F-02-06PA 6 10.4 23.4 32.7 (32.8) 20 (20) AS22m1F-02-08PA 8 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-10PA 10 15.9 26.9 36.2 (36.3) 15.6 21 (22) AS32m1F-03-06PA 6 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 37 (39) AS32m1F-03-08PA 8 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-10PA 10 15.9 26.7 37.9 (38.3) 28 15.6 39 (41) AS32m1F-03-12PA 12 18.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

CRB2/CRBU2/CRB1

d1 = d3 for sizes 20 to 40.

CQS

, refer to page 7-6-20.

15

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10

PF-OMN0009_C

40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

MXS

30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L/Symmetric style ZZ Z 0.5 22 24 Basic style 6 M 3H9 3 deep +0.025 0 +0.025 0 2.5

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.