Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 6-16-24 Solid state switch Reed switch Rail Grommet 6-16-25 Tie-rod Grommet 6-16-26 2-color indication 6-16-40 Band Grommet CJ1 6-16-41 6-16-42 Rail Grommet CJP 6-16-43 Tie-rod Grommet 6-16-44 CJ2 CM2 Direct

PFxx-OMA1007

(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 1 27 22 26 41 3.5 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

SV

to 16 solenoids possible.)

NCQ8

3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.016 +0.008 075(3/4") 075(3/4") #10-32UNF #10-32UNF 5/16 0.31 5/16 0.31 +0.002 0 +0.020 +0.012 106(1 1/16") 106(1 1/16") 5/16-24UNF 5/16-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 150(1 1/2") 150(1 1/2") 3/8-24UNF 3/8-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 1/2-20UNF 1/2-20UNF 1/2 0.87 1/2 0.87 200(2"), 250(

CE

50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25

AC Servo Motor Driver (Pulse input type)

Parameter list for each mode . 15 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 16 4.4 Torque control mode . 17 5.

0.4

.16 stations 16 Note) 16 stations With DIN rail bracket (Without DIN rail) Note 1) Refer to page 419 for details.

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

CP95

80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60

CP95

6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.

Silencer Series AN

Noise reduction: 19 dB(A) BC Sintered Body Type Series AN Noise reduction: 13, 16, 18, 21 dB(A) High Noise Reduction Type Series AN02 Uses a flame resistant material for the case.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS321F-N02-09SD AS321F-02-12SD NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 3/8" 17.9 31.8 43.3 21 39.3 27.8 17 6 12.8 77 80 AS321F-N03-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41

PF-OMN0009_C

) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC

Compact Cylinder

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

44

17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44