70pvpump

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

EXxx-OMW0014CN

11.4. 1 1 2 EX245-ZJP . 11-7 (EX245-ZJP) EX245-DX1EX245-DY1EX245-LA1/LB1 EX245-EA2-1/2/3/4/5 1 3.1.2 79 No.EX-OMW0014CN-A 12. 12.1. . 12-1 . 12-1 EX245-EA2-1 . 11-1 EX245-SPN1A/SPN2A/SPN3A n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6(8 ) mm 80 No.EX-OMW0014CN-A 13. 13.1.

Heavy Duty Stopper Cylinder Series RSH/RS1H

8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 For use in Japan Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 For use in U.S.A.

OMR0031

Signal name Type (3) Turn the "DRIVE" input ON. (1) SVON The Card Motor starts to move to the position set in Step No.1. (3)(6)(10)(13)(18) DRIVE Input (4) The OUT0 (INP) output turns OFF. (2) (12) IN0 (5) The "BUSY" output turns ON. (2) (12) PLC IN1 (6) The OUT0 (INP) output turns ON.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

3

VDC 12 to 24 VDC Load Load U White OUT2 White OUT2 Load U Blue DC () Blue DC () Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less Max. load current: 80 mA, Internal voltage drop: 1.5 V or less PNP (1 output) + Analog (1 to 5 V) output type PFMC7--EPNP (1 output) + Analog (4 to 20 mA) output type PFMC7--FNPN (1 output) + Analog (1 to 5 V) output type

AMF

12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering

AMF

R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME,

AME

12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy of Steven Engineering

AME

J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 1/2, 3/4 1 3/4, 1 1, 1 1/2 1 1/2, 2 36 9 205 19 100 106 3 106 10 AME450 Related poroducts 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

COQ2BP

NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

Manifold Regulator Modular Type ARM2500/3000 Series

End plate ARM2500 ARM3000 O-ring 12 1 13636A 13646A 13636B (Except O-ring) 13646B (Except O-ring) assembly Diaphragm assembly Weather resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5

PSxx-OMV0008CN

No.PS-OMV0008CN-E / / ISE70G--L2 ISE75G--L2 ISE76G--L2 ISE77G--L2 ISE78G--L2 2 9 10 12 15 15 17 19 21 22 3 23 25 27 27 28 F0 30 F1 OUT1 32 F2 OUT2 35 F3 37 F4 38 F6 40 F10 41 F11 47 F14 Zero-cut 48 F80 49 F81 50 F90 52 F96 54 F98 55 F99 57 58 IO-Link 63 IO-Link 63 63 64 IO-Link 67 76 76 77 86 88 -1No.PS-OMV0008CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10

3

Note 1) Tighten the screw to a torque of between 0.5 and 0.6 Nm. Note 2) Cable O.D.: 6 to 12 mm Note 3) For an outside cable diameter of 9 to 12 mm, remove the internal parts of the rubber seal before using. Assembly 1. Insert the cable into the conduit terminal. 2.

PF-OMM0004_C

-20No.PF-OMM0004-D ,FG 1 DC() 2 OUT2 3 DC() 4 OUT1 PF3W7 M8 -21No.PF-OMM0004-D NPN2 PF3W7--A(T)PNP2 PF3W7--B(T)Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN PF3W7--C(T)NPN PF3W7--D(T)PNP PF3W7--E(T)PNP PF3W7--F(T)Max.80 mA 1.5 V E15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C15 V 1 k D420 mA 12 V 300 24 V 600 NPN PF3W7--GPNP PF3W7--HMax.28 V80 mA 1 V 30 ms Max.80 mA 1.5

IC

(Sensor pressure port) External sensor type 123 100.5 70 M3 x 0.5 x 9.5 48 6 (Sensor breathing port) PRESSURE OUT CONTOROLLER RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP Option Panel mount adapter Panel fitting dimension 65 or over 45 +0.5 +0.2 2 M3 x 8 47.4 55 12 62 15 65 or more Protective cover Applicable panel thickness: 0.5 to 4 mm 9.6 50 14-8-40 7 Series IC Specific

MXH Series Compact Slide

Roll moment Mr(Nm) 1 N m = 0.7375 ft lb 31 MXH Series Compact Slide Construction MXH6 (6) MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Series HAW Water Cooled Aftercooler 1

270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8