Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

0.4

Purchasing order is available in units of 10 pieces. KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Operation e [Specify Step No.1 to input the DRIVE signal.] 100 Absolute: 10 10 Operation r [Specify Step No.0 to input the DRIVE signal.]

Cylinder with Lock Series CNG

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

CNG

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

RB/RBL/RBQ

2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

RB/RBL/RBQ

Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D5080 72 36 5 20 10 45 16 16 11 11 95 90 50 100 D5100 89 41 5 25 10 55 20 20 11 12 115 110 60 125 D5125 110 50 7 30 10 60 25 26 13.5 10 Max. 157 130 70 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket. l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.)

Intrinsically Safe Valve

Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order Valve 5 2 LL 3 SY 53 40 UL/CSA compliant Manual override Nil D E Non-locking push type

CG1

2 Basic/Bottom mounting: CG1KRN (mm) Stroke range (mm) Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 Bore (mm) 20 25 32 40 50 63 H1 ZZ H Y GB X GA L B1 S MM E KA AL P LX D I A N LD LH 104 111 117 135 155 161 27 32 32 39 45 45 11 12 13 16 17 19 10 10 10 10 12 12 38 44 45 55 62 64 20 22 26 30 33 39 75 77 83 94 108 114 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 12 14

MHF2

20 122 17 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D Scale: 50% 38 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 71 6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

Hydraulic Filters

is 10 m only.

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position