3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-02 AS3201FE, AS3211FE AS3301FE, AS3311FE AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FE, AS4211FE

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Precision Clean Regulator Series SRP

IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

IR10-OM00007

/N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

Speed Controller: Standard Type Series AS In-line Type 1

2 M4 x 0.7 x 8 Nickel plated JIS B 2805 Nominal 6 Chromated Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Chromated Chromated JIS B 2401 P12 Replacement Parts No. Description Material Parts no. Valve Spring Seal NBR, Stainless steel o !0 !

Pneumatic Positioner IP300/IP3100

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

Air Suction Filter Series ZFA 1

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

ASN AQ ASV Flow Rate and Sonic Conductance Symbol AK AS221F-01 AS121F-M5 AS221F-02 AS321F AS421F Model Tubing O.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

IDX-OM-W023

OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR TDR MOV EDV IDU Series 13-5 13 3 IDX-OM-W023 13 T IDU15E1

20.0

Ground wire (1.5 m)/Accessories IZH-A-01 High-voltage measuring handle/Option IZH-C-01 Soft case/Accessories IZH-B-01 High-voltage measuring handle Ground wire Soft case Note) Be sure to use a high-voltage measuring handle in situations such as during high-voltage measurement when there is a possibility of personnel coming in contact with electricity.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3