2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4) . 37 10 . 41 10.1 . 41 10.2 . 44 10.3 . 46 11 . 47 11.1 . 47 11.2 . 47 11.3 . 48 (1) . 48 (2) () . 48 (3) . 48 11.4 . 49 11.5 . 49 12() . 50 12.1 . 50 12.2 . 51
I/O . 36 6.1 . 36 6.2 (NPNPNP ) . 36 (1) I/O . 36 (2) I/O . 37 6.3 . 38 (1) I/O1 . 39 (2) I/O2 . 42 6.4 I/O . 44 (1) NPN . 44 (2) PNP . 46 7. . 48 7.1 . 48 7.2 . 49 7.3 . 51 7.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8. . 56 8.1 . 56 8.2 . 57 8.3 . 60 8.4 . 64 8.5 . 67 8.6 . 71 2 No.SFOD-OMT0009CN-B 8.7 . 73 8.8 . 73
400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100 3000 1400 3000 1500 3000 51
./ . 48 15.1 . 48 15.2 . 49 15.3 . 50 15.4 . 51 15.5 . 52 2 - 15.6 . 52 16. . 53 16.1 / . 53 16.2 . 53 16.3 . 55 16.4 . 55 16.5 . 56 16.6 . 56 16.7 . 56 3 - LEC-G Series/ 1. *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical
./ . 51 14./ . 52 14.1 . 52 14.2 . 53 14.3 . 54 14.4 . 55 14.5 . 56 14.6 . 56 2 - 15. . 57 15.1 / . 57 15.2 . 57 15.3 . 59 15.4 . 59 15.5 . 60 15.6 . 60 15.7 . 60 15.8LEC . 61 3 - LEC-G Series/ *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of
load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) L3 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 50 51
Refer to page 66 for part numbers. 47 51 Non-standard Motor Series LTF8 Motor Output Rolled Ball Screw 200W 15mm/20mm lead Horizontal Mount How to Order Motor/switch entry direction Stroke F LTF8 NL 1 G X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.
(If the silencer is not provided with a hexagon portion, manually tighten it firmly.) 25 4 1 " (Series KQ) 14 51 16 26 20 78 22 54 30 81 22 54 26 30 97 25 70 2 If the silencer body is made of metal (except the BC sintered style), tighten it at the torque given below. 41 98 25 70 Construction/Parts/Dimensions Connection thread Applicable tightening torque (Nm) 12 to 14 Rc(PT) 1 4 22 to 24
Caution VQ VKF Dimensions VQZ VP3145-DZA1-X81 MAX.10 134 35 VZ 87.4 VS 21 EXH.1 51 VFN EXH.2 71 80 (Non-locking) Manual override 6 to 8 Applicable cable O.D.
B C Dimensions (mm) Recommended flow (m3/min (ANR)) Model Applicable One-touch fitting size Effective area (mm2) Noise reduction (dB (A)) 6 (Series KQ) 6 (Series KQ, KJ) 1/4" (Series KQ, KJ) 8 (Series KQ) 8 (Series KQ) 10 (Series KQ) 10 (Series KQ) 12 (Series KQ) AN103-KM6 AN103-X233 AN103-X235 AN203-KM8 AN200-KM8 AN200-KM10 AN300-KM10 AN300-KM12 0.8 or less 7 37 11 15 25 1.0 or less 14 51
57.5 M16 x 2 132 6 22 11 17.5 depth 13.5 26 77 11 Rc 3/8 112.5 100 20 25 98 28 89 100 67.5 M20 x 2.5 156 6.5 26 12 17.5 depth 13.5 26 94 11 Rc 3/8 132.5 107 24 30 117 29 95 Rod end male threads (mm) H X D L K C Bore size (mm) 20 M8 x 1.25 18 15.5 10 23 8 32 M14 x 1.5 30 27 16 38.5 14 40 M14 x 1.5 30 27 16 38.5 14 50 M18 x 1.5 35 32 20 46 18 63 M18 x 1.5 35 32 20 46 18 80 M22 x 1.5 40 37 25 51
27 60 80 M16 x 2 132 6 22 11 89 57.5 26 111 11 17.5 depth 13.5 Rc 3/8 112.5 20 25 98 28 77 100 M20 x 2.5 156 6.5 26 12 95 67.5 26 119 11 17.5 depth 13.5 Rc 3/8 132.5 24 30 117 29 94 Rod end male threads (mm) C D L K H X Bore size (mm) 20 15.5 10 23 8 M8 x 1.25 18 32 27 16 38.5 14 M14 x 1.5 30 40 27 16 38.5 14 M14 x 1.5 30 50 32 20 46 18 M18 x 1.5 35 63 32 20 46 18 M18 x 1.5 35 80 37 25 51
Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate. External Pilot SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.
104 57 59 51 93.5 100 63.5 58.5 114 65 70 58.5 104 114
How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow
temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51
I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03
+ Static moment (M) Allowable dynamic moment (ME max) 1 Allowable static moment (M max) + Determination 3 3-Dimensional Transfer Single Unit Type Series MF Construction MF15 Material Note Parts list Material Note Parts list Description Qty. 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 4 2 4 2 2 2 9 5 Qty. 1 Description Cylinder tube No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 44 45 46 47 49 50 51
] Approx. 300 (Lead wire length) L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10
Dimensions VH21 -N02 VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-1/4,3/8NPT 12 4-1/4NPT VH33 -N02/N03 (Bottom porting) 2 (A) Panel cut dimension 44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51