Stations: 3 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 5 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 6 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 15 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 4 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

EXxx-OMY0004

Appendix C: i-Parameters . 103 20. Appendix D: Diagnostic messages for parameter errors for PROFIsafe .. 104 21. Appendix E: Checklists . 105 22. Appendix F: Safety Characteristics. 109 23. Appendix G: EX245-FPS Timing Values . 110 24. Appendix H: Cybersecurity . 111 3 No.EX##-OMY0004 1.

EXxx-OMY0006CN

PROFIsafe (Acknowledgement) . 99 17.A . 100 18.BF. 102 19.Ci. 103 20.DPROFIsafe . 104 21.E . 105 22.F . 109 23.GEX245-FPS . 110 24.H. 111 3 No.EX##-OMY0006CN 1. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines

PFxx-OMY0005

The normal accumulated display consists of the mantissa part (maximum 6 digits) and [Power value display] indicated by the index part displayed by 106 or 103.

Step Motor Driver （ Pulse input type ）

Return to origin parameter setting Setting value ORIG mode ORIG sensor 1 Pushing origin operation [Stop] Sensor N.O type [N.O] RESET ORIG Sens ALM (1-103) The origin sensor is not effective. [Disabled] or Sensor N.O type [N.O] C SVON 2 Limit switch origin input [Sensor] Alarm is generated with condition above when the sensor is not mounted to the electric actuator.

ATX-OM-F004E

Electric circuit diagram 5Electric circuit diagram HAA7-061 HAA7-062 HAA15-101 HAA15-103 HAA22-143 HAA37-143 HAA Series 8 5. Electric circuit diagram ATX-OM-F004E Air-Cooled Aftercooler 6. Installation 6.

1.63

MGPWA 32 to 63/A, E Dimensions (mm) Bore size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st or less Over 25 st 100 st or less Over 50 st 100 st or less Over 100 st Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st D20 25 32 40 50 63 57.5 53.5 62.5 55.5 37.5 33.5 42.5 35.5 20.5 16.5 21.5 14.5 109.5 109.5 123 123 89.5 89.5 103

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MNB

92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W

C95

103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11-8 Series C95 Accessories Rear single clevis C Rear double clevis D CJ1 CJP CJ2 CM2 Bore (mm) TG1 E1 EW FL L1 L L2 d1 CD MR d2 R1 E2 UB CB 45 51 64 74 94 113 26 28 32 40 50 60 32.5 38 46.5 56.5 72 89 22 25 27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

W1 TY TF TT TH Z TR TS TO TE TX TC TA TU TD-H10 (Hole) TL CXW 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 62 60 45 12 17 93 9 10 17 119 85 102 10 60 80 15 CA1-S04 74 60 45 12 17 103 9 10 17 129 95 112 10 60 80 15 CXS CA1-S06 90 73 55 14 22 107 11 10 20 150 110 130 15 70 100 18 110 100 75 17 24 129 13.5 12 26 192 140 166 15 90 120 25 CA1-S08 CXT 130 100 75 17 24 135 13.5 12

CJ2

D GA H MM 100st 149 15st 84.5 86.5 30st 92 95 45st 104 107 60st 116 119 75st 125 125st 167 150st 179 100st 111 15st 48.5 48.5 30st 56 57 45st 68 69 60st 80 81 75st 87 125st 129 150st 141 10 16 15 15 5 8 12 18 14 20 8 10 M4 X 0.7 12.5 18.5 3.2 6.5 12 18 4 5 8 8 28 28 M5 X 0.8 12.5 23.5 T mounting dimensions (mm) ZZ 5 to 15st 95.5 100.5 Bore Bore size TC TH TV TW TX TY 16 to 30st 103

CXS

0.8 with depth 8 2-M8 x 1.25 x 23 (Hexagon head bolt) 2-M8 x 1.25 (Hexagon nut) 2-M8 x 1.25 x 16 (Hexagon socket head cap screw) 8-M5 x 0.8 with depth 7.5 (Opposite side: Same) (30) (Z) 30 (mm) 19 11.5 Z ZZ SS S 10 Model CXSW32-10 CXSW32-20 CXSW32-30 CXSW32-40 CXSW32-50 CXSW32-75 CXSW32-100 CXSW32-125 CXSW32-150 CXSW32-175 CXSW32-200 143 213 83 9 20 153 233 93 20 Standard stroke 163 253 103

Table of Contents

Series AKH/AKB Check Valve with One-touch Fitting. 92 92 92 93 94 95 95 95 95 97 99 100 100 100 101 102 103 103 104 105 106 107 107 107 108 109 110 110 111 112 113 114 114 114 115 115 116 116 116 116 117 117 118 118 118 119 119 120 120 122 123 124 124 124 124 125 125 126 Features. Series AKH/AKB Check Valve with One-touch Fitting. How to Order. Specifications. Dimensions . Construction.

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MGP

103 Over 200st 150 150 171 171 50st or less 21.5 15 21 16 Over 200st 80.5 74 89 84 A E HT Bore size (mm) 32 40 50 63 110 118 146 160 Over 50st to 200st 94.5 95 112 112 128 128 152 172 Over 50st to 200st 31.5 31.5 42.5 36 46 41 45.5 46 Over 200st 132 132 150 150 171 171 203 213 Over 200st 69 68.5 80.5 74 89 84 96.5 87 XC4 80 93 113 121 153 167 205 244 XC35 80 93 110 118 146 160 200 238 50st