OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280 340 5.5 6.5 8 15.5 20 23.5 Rc1/16 Rc1/16 Rc1/8 13 13 23 11 12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

Low Profile

)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 4.2 VDC (Rated 35%)/ 0.8 W Holding*2 Holding voltage/ Power consumption *1 For use with fluids other than air or nitrogen, please contact your SMC sales representative. *2 Please make sure the coil surface temperature does not exceed 80C.

Vacuum

Flat with rib Deep type Deep type Applicable Tube IPY $enies lfith Bulfer Pad Diameters s6. oB Pad Diameters @20. o25. s32 Bellows type 15.5 / \Lr ,1 Adador Plale hrbe titling, Sefles M5) Applicable Tube Applicable Tube Pad Diameters a4O . o5O Pad Diameters s1O. o13. o16 Bellows type lube litling, Seris [i15) 1 0 12 26 42 76 a7 5.5 13.85.5 1 8 524.5 44.5 55.5 78.589.5 8.7 1 9 7.5 1 6 1 8

Digital Flow Switches

Display Type for Air Internal circuits and wiring examples PF2A710, 750 to are terminal numbers. 60 82 98 17 58 67 6 1.6 Brown 1 Load OUT1 Main circuit Main circuit 4 Load Black FLOW SWITCH OUT2 UP 2 + 12 to 24VDC White 44 54 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 4-4.5 40 50 Brown 1 OUT1 4 Black White Load (41.5) OUT2 2 + 12 to 24VDC Load 3 Blue PF2A7--67(-M) 4 42

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Black White Load (41.5) OUT2 2 ZSP + 12 to 24 VDC 3 Load ISA2 Blue PF2A7--67(-M) IS 4 42 ZSM PF2 2-3.4 IF 43 Flow direction Data PF2A711/721/751 64 23 116 1.6 88 Connector pin numbers 4 3 FLOW SWITCH U P 34 54 44 SET OUT1 OUT2 DOWN 2 1 FOR AIR Pin no

SQ1000/2000

42 P. 49 C6 L6 Terminal number D-sub connector SOL.

SZ3000

Single solenoid SZ3160-5MO Common connector assemblies SX100-42-4D Port B Port A Plug position N.C. N.O.

ZX

Unit for replacement Combination of supply valve and release valve S 0.3 to 0.7 mm B 0.5 to 1.2 mm Piping specifications Unit for replacement (Refer to page 13-2-42 for details.)

Vacuum

Flat with rib Deep type Deep type Applicable Tube IPY $enies lfith Bulfer Pad Diameters s6. oB Pad Diameters @20. o25. s32 Bellows type 15.5 / \Lr ,1 Adador Plale hrbe titling, Sefles M5) Applicable Tube Applicable Tube Pad Diameters a4O . o5O Pad Diameters s1O. o13. o16 Bellows type lube litling, Seris [i15) 1 0 12 26 42 76 a7 5.5 13.85.5 1 8 524.5 44.5 55.5 78.589.5 8.7 1 9 7.5 1 6 1 8

This is a legacy product, and replaced byVFR3110-3DB-02T

This is a legacy product, and replaced byVQZ3120-5L1-02T

This is a legacy product, and replaced byVV5FS2-01T1-051-02T

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 3 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02T (NPTF1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: 02T (NPTF1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: 02T (NPTF1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02T (NPTF1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: 02T (NPTF1/4), Mounting Method: D (DIN Rail Mounting)

Stations: 5 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02T (NPTF1/4)

This is a legacy product, and replaced byVFS3220-BD-02T