0.01

9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) Prefix the part number of the air

Modular Type Filter Regulator Series AW

Float type auto drain AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) N.C. Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

•

(Same sunace) (n =2, 4. 6, S .. ) (I = 4 , 8, 12. 1 6'~"),--,-_ "-=,-4" '::J ~".-, ..,( ", = S. 12 ' =-6._) -1 R. Different surfaces 35 110 1 ~ ~N~_~s.

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MXF

M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke

HRX-OM-T004

Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking . 6-2 6.3.1 Setting and checking items . 6-2 HRS090 Series HRX-OM-T004 Contents 6.3.2 Setting and checking . 6-3 HRS090 Series HRX-OM-T004 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

IDX-OM-W026

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 !7 !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

MHF2

6 Parts list Parts list Note Material No. Description No.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Bernoulli Gripper

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.