Compact Cylinder with Air Cushion and Lock Series RLQ

10 14 20 96 + Stroke 106 + Stroke 37 + Stroke 32 7 +0.4 +0.2 18 36 -0.1 -0.3 28.5 Rod end nut 6 Series RLQ Dimensions/40 (Emergency Stop) Both ends tapped/RLQA40 3.2 16 3.2 16 2 x 4-M5 x 0.8 Standard type (through hole)/RLQB40 Extension locking PC Rear cylinder port PC Front cylinder port LOCK 62 20 M8 x 1.25 Effective thread depth 13 11 2-5.5 through 2 x 2-9 counterbore depth 7 69 16 52

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

Miniature Fittings M3, R(PT) 1/8, M5 Series M

64 52 61 73 57 60 72 73 81 104 72 80 104 92 100 124 90 98 123 10 26 15.5 1.5 1.4 10 4 2.5 6 4 14 10 15.2 3 5 25.7 19 12 5 4 9.4 17 20.5 16.2 12 27.2 14 8 6 5 14 17 6.5 5.5 18 22 10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.

Antistatic One-touch Fittings Series KA

46.5 46 27 25 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 28 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 13 15 17 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

Miniature Guide Rod Cylinder Series MGJ

DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Switch main circuit Switch main circuit Switch main circuit OUT Black 5 52 52 52 DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC () Blue 3.1 10.9 3 D-F8B OUT (+) Brown 4 Most sensitive position 8 OUT () Blue 8

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

AC Servo Motor Driver (CC-Link Type)

An overload alarm will occur when margin is 0%. 0.1% 17 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses. An excessive error alarm will occur when margin is zero pulses. 16pulse 18 Settling time The settling time for position control is displayed.

AC Servo Motor Driver (CC-Link Type)

An overload alarm will occur when margin is 0%. 0.1% 17 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses. An excessive error alarm will occur when margin is zero pulses. 16pulse 18 Settling time The settling time for position control is displayed.

Digital pressure switch for energy-saving control ejector

Specification 52 1 - NO.

PSxx-OMR0001CN

) -41No.PS-OMR0001CN-J 4 () (ON/OFF) () (44 ) () (OFF) (OFF) (OFF) (ON) (ON) () -42No.PS-OMR0001CN-J 4 30 [F10](52 ) SUP OFF OUT SUP SUP () OUT OUT () OFF SUP OUT , 1 [0 kPa] -43No.PS-OMR0001CN-J 4 (48 ) ISA3-F () () ISA3-G () () ISA3-H ON OFF () () ON() OFF() -44No.PS-OMR0001CN-J 4 (1)(100 kPa200 kPa) (2) () (1) (2) 1 () (3) -45No.PS-OMR0001CN-J 4 2 [F 0] [F] 2

Digital Gap Checker

When changing to switch point setting mode (distance setting mode), set in the function selection mode (page 52). Default settings of OUT1 Refer to the figure below for the default settings of OUT1. ISA3-F ISA3-G ISA3-H The switch output turns ON when the display value is less than switch point.

PSxx-OMT0001CN

() (OFF) (OFF) (OFF) (ON) (ON) () -43No.PS-OMT0001CN-E 4 30 [F10](56 ) SUP SUP 1 2 OUT1 OUT SUP OFF 1 2 SUP SUP () 1 SUP SUP () 2 SUP SUP () 2 OUT OUT () 1 OFF 1 SUP OUT , 1 [0 kPa] 2/ SUP / 1 ,/ -44No.PS-OMT0001CN-E 4 OUT1OUT2/ OUT1OUT2/ (50 ) ,OUT2 ()(52 ) OUT1 OUT1 ISA3-F () () ISA3-G () () ISA3-H () () ON() OFF() -45No.PS-OMT0001CN-E 4 OUT2 , (OUT

EXxx-OMN0027CN

No.EX-OMN0027CN-D PROFIBUS DP SI // EX600-SPRA EX600-ED 2 8 9 11 13 13 15 SI 16 16 17 17 18 LED 22 24 25 26 27 29 29 31 32 42 43 52 52 63 GSD 63 63 SIEMENS PLC S7 64 67 69 70 78 -1No.EX-OMN0027CN-D [][][] (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

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PB1013A/Air-operated type without foot 37 mm 52 mm 37 mm 52 mm 66 mm 66 mm Application Examples Application Examples Space saving (Air operated) Printing machine Semiconductor/ LCD equipment Analyzer for medical and biochemistry Car washing machine Ink/solutions supply DI water/solutions supply, Waste fluid collection Water/ detergents supply Reagents supply Machine tool Cleaning device Devices