FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

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Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

Nozzle Diameter: ø1.0, Exhaust: 3 [Common Exhaust (Only Manifold)], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch

Nozzle Diameter: ø0.7, Exhaust: 2 [Port Exhaust Rc(PT) 1/8], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP

Nozzle Diameter: ø1.0, Exhaust: 2 [Port Exhaust Rc(PT) 1/8], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch:

Nozzle Diameter: ø0.5, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Lead Wire, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP, Lead

Nozzle Diameter: ø0.5, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP,

Nozzle Diameter: ø1.0, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Lead Wire, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP, Lead

Nozzle Diameter: ø0.7, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: B (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)

Nozzle Diameter: ø1.3, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: A (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: H (Grommet Type w/0.6m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style

Nozzle Diameter: ø1.3, Body Style: 5 (Manifold w/Individual SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor

Nozzle Diameter: ø0.5, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor

Nozzle Diameter: ø1.0, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: T (NPTF), Supply/Release Valve: B (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage