ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Stopper Cylinder

0 w q e r t u !

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

REA/REB

CB CR A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24 5 14 M4 x 0.7 x 6 REAR15 2 0.5 12 8 4.2 17 8 7 33 31.5 32 30 31 30 8.5 17 M5 x 0.8 x 7 Max.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Sysytem Figure Silencer System Solenoid valve Speed controller 4 X M5 6 X M5 6 X 1/8 6 X M5 AS1301F-M5-04 A SYJ3000 M5 X 0.8 (S = 1.8mm2) AS1301F-M5-06 B q AN120-M5 (S=5mm2) AS2301F-01-06 C 6 X M5 AS2001F-06 D w 1.2-9 Series SYJ3000 How to Order Bracket Light and surge voltage suppressor Configuration S Z R U Without light and surge suppressor With surge suppressor With light

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

PSxx-OMM0006CN

3585RH() AC250 V 1 50 M (DC500 V ) UL Max. 50 2F.S.(25 ) CEUL/CSARoHS 1 01 N01 R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

VQC

Refer to e.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5 x 0.8 C 15 18.3

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra