5

4 84 147 50 M8 x 1.25 7 18 M18 x 1.5 30 3/8 90 160 63 M10 x 1.25 7 18 M18 x 1.5 31 3/8 98 171 80 M12 x 1.75 10 22 M22 x 1.5 37 1/2 116 205 100 M12 x 1.75 10 26 M26 x 1.5 40 1/2 126 216 202 Smooth Cylinder CA2Y Series Single Clevis: CA2YC G 2 x P G 2 x P G G Width across flats KA Width across flats KA 4 x J 4 x J 2 x Cushion valve 2 x Cushion valve CDH10 CDH10 MM MM REA E D D E B C B C REB

1

1.0 12 M6 x 1.0 40 9 M6 x 1.0 12 M6 x 1.0 50 12 M8 x 1.25 16 M8 x 1.25 63 12 M8 x 1.25 16 M8 x 1.25 80 15 M10 x 1.5 20 M10 x 1.5 100 18 M12 x 1.75 24 M12 x 1.75 Note) Other dimensions are the same as standard type.

One-touch Fittings

N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

VXA21/22

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

NARM Ser ies

n) + 23 Common IN .13 (57) NARM1000 1 8 1 8 (79 X n) + 25 Individual IN Common IN 1 4 1 8 (188 X n) + 43 NARM2000 .3 (136) Individual IN 1 8 1 8 (187 X n) + 45 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

ASP

Made to Order Lubricant: Vaseline X12 547 Series ASP How to Order ASP 3 30F 01 06 S Made to Order Lubricant: Vaseline X12 Ex.) ASP330F-01-06S-X12 With seal Pilot check valve Body size Applicable tubing O.D.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(There is a piping of X, PE port in the both sides.)

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

90

E x F x G x H 3600 Power consumption of existing product: 75,938 yen/year for 18,750 of total operation hours.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

VS7-6

2-M4 X 54 bolts for 3 position valve Note) Based on JIS C4003.

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Fieldbus system EtherNet/IP compatible SI Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMZ0024 Data

S Couplers Series KK/KKH/KK13

-08E M16 x 1 20.0 19 43.4 8 18.5 15.7 30.2 6.0 22.6 22 -10E M20 x 1 22.0 24 46.4 10 21.0 22.6 54.7 L2 L3 M KK4P-06E M14 x 1 16.8 17 47.0 6 4.7 17.0 12.8 10.1 30.6 17 -08E M16 x 1 20.0 19 50.2 8 6.2 18.5 22.6 19.8 38.2 L1 25.2 1/4 22 -10E M20 x 1 22.0 24 53.2 10 7.7 21.0 35.3 27.6 61.4 -12E 54.2 9.0 40.2 75.2 24 M22 x 1 23.0 27 12 22.0 50.9 KK6P-12E 60.1 9.2 41.2 86.1 31.0 1/2 30 -16E M28

Modular Type Air Filters Series AF

M28 X 1 M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 28.5 38.5 42.5 T 15.4 8 10.5 E 30 38 F 70(max.73) 83(max.86) 88(max.92) Z 6 7 7 AA 14 19 21 Y 30 31 35.5 H 5 3.5 1.5 S 5.4 6.5 8.5 AW20 AW30 AW40 Auto Drain mm Dimensions Model Port Size C NPT 1/8 NPT 1/4 GaugePort D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5