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Note 15) Standard lead wire length for pressure sensor is 3 m. Standard lead wire length with connector for switch for vacuum and the lead wire length for switch with energy saving function is 2 m. Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications.

E N S I O N S P I S T O N R O D C L E V I S D I M E N S I O N S M O U N T I N G N U T B C D Part No Bore Size A 0.65 0.13 3/8-24UNF NSNP-P006 6 (1/4) 0.56 0.79 0.16 1/2-20UNF NSNP-P010 10 (3/8) 0.69 0.86 0.19 9/16-18UNF NSNP-P015 15 (5/8) 0.75 B C D Part No Bore Size A 0.11 0.36 5-40UNC JM-005 6 (1/4) 0.31 0.43 0.13 10-32UNF JM-02 10 (3/8) 0.38 0.43 0.13 10-32UNF JM-02 15 (5/8) 0.38 F ND

x 1.5 l m t Applicable snap ring Part no.

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

x 1.5 l m t Applicable snap ring Part no.

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

-963-7099 Fax: 02-501-2937 Chile Phone: 02-270-8600 Fax: 02-270-8601 United Kingdom Phone: 01908 563888 Fax: 01908 561185 Italy Phone/Fax: 02-9271365 Rochester Phone: (716) 321-1300 Fax: (716) 321-1865 Dallas Phone: (972) 446-9554 Fax: (972) 446-5931 Oceania Australia Phone: 02-9354-8222 Fax: 02-9894-5719 Netherlands Phone: 020-5318 Fax: 020-5318880 Mexico Phone: 47-22-55-00 Fax: 47-22-59

3 y r t !1 RE A B REC CX CY A A MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Enlarged view of A Component Parts RS H A Description No.

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application

l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

) / CAN_L Low FG(DRAIN) VDeviceNet T T T 6m T T DataRate 500kbps 100 m 6 m 39 m 250kbps 250 m 78 m 125kbps 500 m 156 m 100 m 121 1%(1/4 W) DeviceNet AWG18 (0.82 mm 2) AWG15 (1.65 mm 2) AWG24 (0.20 mm 2) AWG22 (0.33 mm 2) 120 10%(1 MHz) 120 10%(1 MHz) 1.36 ns/ft(max.) 1.36 ns/ft(max.) 0.13 db/100 ft@125 kHz(max.) 0.25 db/100 ft@500 kHz(max.) 0.36 db/100 ft@1 MHz(max.)

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 16-14-21

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 14-21-21

Kodanska 46, CZ-100 10 Prague 10 Phone: 02-67154 790, Fax: 02-67154 793 Hungary SMC Hungary Kft. Budafoki ut 107-113, 1117 Budapest Phone: 01-204 4366, Fax: 01-204 4371 Sweden SMC Pneumatics Sweden A.B. Ekhagsvgen 29-31, S-14105 Huddinge Phone: 08-603 07 00, Fax: 08-603 07 10 Ireland SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co.