Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

0.5

15 Discharge time [s] Discharge time [s] 15 15 15 15 Air flow level: 1 Discharge time [s] Discharge time [s] Discharge time [s] Discharge time [s] Air flow level: 1 Air flow level: 1 Air flow level: 1 10 10 Air flow level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200

Fieldbus system Ethernet POWERLINK compatible SI unit

2006h 00h DXD, IN 0 15 (Slot 2) RO : : : 2020h 00h RO *1: RO means Read Only data.

EXxx-OMY0006CN

Fig. 15-1 Dimensions of the Modules manifold Table 15-1 M 0 1 2 3 4 5 6 7 8 L1 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L1 = 54n + 113.6 (8 ) 85 No.EX##-OMY0006CN 15. 15.1. EX245-FPS1/2/3 Table 16-1 1/2(XF1/2) No. SI Auto negotiation 1 LINK/ACT LED SI Table 16-2 PROFINET No.

HRX-OM-W060

25 Circulating fluid temperature[] Fig. 8-5 Cooling Capacity (HRL100-A-20) 8.4.2 HRL200A20 CH1 30 25 Ambient 20 temperature 32 Cooling capacity [kW] 15 Ambient temperature 45 10 This is the cooling capacity of the 5 CH1 side when 1 kW heat load is applied to the CH2 side. 0 15 20 25 Circulating fluid temperature[] Fig. 8-6 Cooling Capacity (HRL200-A-20) HRL Series 8.4 Cooling Capacity 8-

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

JXCx-OMT0061CN

No.JXC-OMT0061CN CC-Link (DC24V) / LECPMJ 1 . 4 2. . 6 2.1 . 6 2.2 . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8(). 11 9 . 11 3. . 12 3.1 . 12 3.2 . 13 3.3 . 14 (1) (LECPMJ-) . 14 (2) DIN (LECPMJD-) . 14 3.4 . 15 (1) . 15 (2) . 15 (3) . 16 4. . 17 4.1 (STATION NO.B RATE) . 17 4.2 . 18 4.3 PLC . 18 5. . 19 5.1 CN1: . 19 5.2 CN2CN3: . 19 5.3

MHF2

Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4 20 Accessory option: Hexagon socket head screw (special screws) 3.3 2-2.5H9 +0.025 0 depth 2.5 3 9 9 2-M4 x 0.7 thread depth 5 Groove for auto switch mounting 14 14 Mounting thread 15 38 12-3-15 16 Series MHF2 Dimensions MHF2-12D1 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 58 4 40

ASR

For the adjustment method, please refer to Selection and Adjustment on page 15-16-6 to 15-16-7. 4. For installation and removal, tighten the body B by applying an appropriate wrench to the two opposite sides of the hexagon. Using other parts may destroy the valve. For alignment after installation, rotate body A manually. 5.

MHF2

closing port Mounting thread E 7.7 14.8 15 19 25 E 0 -0.1 20 2-3.4 through (Mounting hole) 21 1 21 1 Finger opening port M5 x 0.8 +0.1 0 2-5.5 Close: 0 E-E Open: 241 Use the attached hexagon socket head screws for mounting holes. 8-M3 x 0.5 thread depth 4 4-M4 x 0.7 thread depth 5 Mounting thread 44 Attachment mounting thread Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 105 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the bottom dimension is for 700 to 1200mm strokes.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

CE

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CG5-S

40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 23 130 32 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 CG-E080SUS 258 23 131 32 Plug bolts are

CE

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

44

10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/8" (9.53) KG 17 19 23.3 8.5 8.5 40