SMC Corporation of America
Elite Part Number Search
Search Results "VXA2120-01F-1"

Body Class: 2 (ø4 Orifice), Fitting Type: V, Tube Size: 03 (1/8" or ø3), Output Tube Size: 04 (ø4), Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)

Flange Size: 100, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: H0 (5 to 150°C, No Heater), Version: 1 (Legacy)

Flange Size: 160, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)

Flange Size: 100, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: None (Position 1), Material: Standard, Option: 1 (With Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 03 (Rcø3, NPT1/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)