AZ1000

freezing) 1.6 2 x 10-11 Pam3/sec 1 x 10-10 Pam3/sec 4 x 10-9 Pam3/sec Ra 10 in. (0.25 m) Face seal, Tube weld 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 2.2 in3 (36 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume 42

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size 32 [mm] Bore size Arm opening angle A B C D E 25 90 148.4 69.4 72 30 30 105 152.5 73.5 32 90 157.7 73.6 71.5 40 35 105 3 Power Clamp Cylinder CKZT -X2797 -X2798 Dimensions: With Manually Operated Handle CKZT S-X2798 R L Refer to the CKZT S-X2797 (page 3) for dimensions other than those shown below. 47 42

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

CP95

+0.15 GKM12-24 12 48 12 24 24 40 M12 x 1.25 62 +0.50 +0.15 GKM16-32 16 64 16 32 32 50, 63 M16 x 1.5 83 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 32 KJ10D 10 43 28 14 20 13 14 M10 x 1.25 40 KJ12D 12 50 32 16 22 13 16 M12 x 1.25 50, 63 KJ16D 16 64 42

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

preparation equipment 16 17+ST 4-M3 x 0.5 thread depth 4.5 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5 thread depth 3.5 Vacuum suction port 35 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port 61+ST ST 15 49.5+ST 3.5 8 13 1 M5 x 0.8 x 4L 4 16 14+ST 4.5 4.5 (Hexagon socket head set screw) M8 x 1.25 x 8L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42

Low Profile Guide Type

head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41 Chrome molybdenum steel Hexagon socket head plug Cylinder tube gasket Piston seal Scraper 42

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension

REC

pressure RSQ/RSG Mounting bracket symbol and figure REC MPa REC25 30 Load weight M (kg) 25 32 40 20 RSH REC20 20 Front flange: F Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

REC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable

CP95

+0.50 +0.15 GKM12-24 12 48 12 24 24 40 62 M12 x 1.25 +0.50 +0.15 GKM16-32 16 64 16 32 32 50, 63 83 M16 x 1.5 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 KJ10D 10 43 28 14 20 13 14 32 M10 x 1.25 KJ12D 12 50 32 16 22 13 16 40 M12 x 1.25 KJ16D 16 64 42

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NX NZ Material: Rolled steel C85 Applicable bore size (mm) 125 140 160 180 200 250 300 Y-12 +0.084 0 +0.3 +0.1 0.1 0.3 32 25 64 Part no. 8 46 100 M30 x 1.5 27 42 D C B d H Y-14 125, 140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 0.1 0.3 +0.084 0 +0.3 +0.1 36 28 72 8 48 105 M30 x 1.5 30 47 53.1 44 46 18 M30 x 1.5 C95 Y-16 +0.1 0 +0.3 +0.1 0.1 0.3 40 32 80 8 55 110 M36 x 1.5 34

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DB A C C D C D D -X 20 25 32 30.5 36.5 (35) 3.5 4 2.5 (1) 38.5 6.5 40.5 32 38 (36.5) 2 5.5 4 (2.5) 40 8 42 2042.5 48.5 (47) 0.5 7 5.5 (4) 50.5 9.5 52.5 Data As for auto switch mounting

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42