Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Low Profile Guide Type

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 CY1L Load [N] 70 CY1H 60 15 50 CY1F CY1F 40 30 10 CYP 20 10 0 Adjuster holder 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Slit Valve

CAUTION 236 46 Cassette type Full MESK 49 532 Slit Valve XGT Series Dimensions Cassette type standard/XGT312 440 336 336 60 50 50 50 112 377 244 59 Valve seat side (XGT312, 313, and 311 common) Cassette type half MESK/XGT313 60 405 45 36 XLA XL 59 XLQ XM XY Non-cassette type/XGT311 D62 50 Opening size XSA 348 336 Opening size XVD XGT XGT 280 97 CYV 59 244 533 XGT Series Made to Order Specifications

XM, XY

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b XMA, XYA Series Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature (C) 5 to 60 (High temperature

High Power Cylinder:

22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Special Application: 10-AF (Clean Series), Body Size: 50, Thread: N (NPT), Port Size: 10 [1 (Size 50, 60)], Bracket: None, Bowl Type: 2 [Metal (Size 20 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Nylon Bowl, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: Bracket, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Nylon Bowl, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: Bracket, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 3 + W

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Drain Cock, Semi-Standard, Body Size 30, 40, 50 & 60: Flow Direction: Right to Left

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1, Mounting: Bracket, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Drain Cock, Semi-Standard, Body Size 30, 40, 50 & 60: Flow Direction: Right to Left

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L) [m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Terminal no.

Clean Air Module

LVB3-8-3 Threaded type NPT 1/4 LVB3-8-4 End plate assembly 7 With 12 One-touch fitting LVB4-8-1 With One-touch fitting Rc 3/8 LVB4-8-2 Threaded type NPT 3/8 LVB4-8-3 Each module has 2 connecting brackets. 337 LLB Series Flow Rate Characteristics LLB3-1-P1R1VSF: Standard (100 L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60

Fluoropolymer Piping Equipment

Note) Metric size 6, 8, 10 10, 12 Inch size 1/8", 3/16", 1/4" 1/4", 3/8" 3/8", 1/2" LVC Orifice diameter 4.4 8 10 0.4 1.2 1.8 Flow rate characteristics Av x Kv LVA 0.5 1.4 2.2 Cv Withstand pressure (MPa) 1 LVH Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 LVD Ambient temperature (C) 0 to 60 Weight (kg) LVQ 0.055 0.115 0.185 Note) For details of the applicable tubing sizes

212

[0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60

Booster Relay Series IL100

IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58