5% F.S. or less?3% F.S. or less?

5% F.S. or less?3% F.S. or less?

5% F.S. or less?3% F.S. or less?

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Typically 1-1/4 turn past nger tight of the nut after inserting the tube into the tting. Please use stainless steel material for piping. After installation, perform a leak test. 5 Process Gas Equipment Common Precautions 2 Be sure to read before handling. Maintenance Export Warning Warning 1. Perform a routine maintenance.

O

AKB/AKH CHECK VALVES Available with One-Touch Fitting; Bushing Type and Straight Type; Applicable OD in metric: 4, 6, 8, 10, 12 and in imperial: 5/32, 1/4, 5/16, 3/8, 1/2. ASD DUAL SPEED CONTROLLER ZFC VACUUM FILTER Inline Type with One-Touch Fittings; Applicable Tube Sizes Metric: 4, 6, 8mm; Imperial: 5/32, 1/4 5/16; Cartridge Type allows Element Replacement.

Lubricator Series AL10 to 60

AL Standard Specifications AL30 AL40 AL60 AL10 AL20 AL40-06 AL50 Model 1/4, 3/8 Port size 1/4, 3/8, 1/2 1 M5 x 0.8 1/8, 1/4 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 1/4: 30 3/8: 40 1/2: 50 Note) 1/4: 30 3/8: 40 220 Minimum dripping flow rate (/min (ANR)) 4 15 50 190 Oil capacity (cm3) 55 135 7 25 135 135 135 Recommended lubricant Class 1 turbine oil (

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications Centralized control of multi-point lubrication (1) Model name D.P . Lube D.P . Lube Unit ALDU600 ALDU900 ALD900 ALD600 AV Model Low oil consumption volume 1 4 1 1 1 4 1 1 3 4 1 3 4 1 AU Simplified oil feeding volume setting in which only the pressure differential is adjusted.

D. P. Lube (Unit) Series ALD(U)600/900

Standard Specifications Centralized control of multi-point lubrication (1) Model name D.P . Lube D.P . Lube Unit ALDU600 ALDU900 ALD900 ALD600 AV Model Low oil consumption volume 1 4 1 1 1 4 1 1 3 4 1 3 4 1 AU Simplified oil feeding volume setting in which only the pressure differential is adjusted.

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

Electro-pneumatic Proportional Valve Series VEF/VEP

1 !2 !3 !4 !5 !6 !7 !8 !

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

CEU1

[SHIFT] [DATA] SEL SHIFT SET -9.9+9.9 [SET] [SET] MODE [SEL] OUT1OUT2OUT3 SHIFT [SHIFT] [DATA] SEL SHIFT SET 0 9.9 [SET] [SET] MODE DATA [DATA]O H C O(100ms) H C SEL DATA SET MODE [SET] [SET] 13 CEU1 CEU5 99.5(mm)100.5(mm)OUT2 (OUT2-COM ON) 100.0OUT2 0.5OUT2 C 1 MODE SEL OUT2 4 SHIFT 1 DATA 100.0 1 SET 1 MODE 1 SHIFT 5 DATA 0.5 1 SET 1 MODE 3 DATA C() 1 SET 1

Suction Filter with Case FH99 Series

Common with L-type threaded and flange L-type flange Nominal filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 04 06 08 10 12 16 20 24 28 32 1/2B 3/4B M Micromesh Element Differential pressure indication 1B 0 4 5 None Differential pressure indicator Differential pressure indication switch Note) 1 1/4B 1 1/2B 2B Hydraulic fluid 2 1/2B Note) N.C. and N.O. common 0 1 2 N W V Petroleum

VFS1000

5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 How to Order 01 VFS1 1 20 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G T Port size 01 F Rc 1 8 2 position double SJ Option 2 Mountable only for VFS1120.

PF3A7

(The SI unit type is provided for use in Japan.) 7 Fixed unit: Instantaneous ow: L/min Accumulated ow: L Large flow type Thread type Nil Rc N NPT F1 G Options Nil With lead wire and M12 connector (3 m)5 1 ISO 1179-1 compliant N Without lead wire and M12 connector 5 Option is shipped together, but not assembled.

5% F.S. or less?2% F.S. or less?2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?

5% F.S. or less?2% F.S. or less?2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?

5% F.S. or less?2% F.S. or less?2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?

5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?