PSxx-PSV0007

P.1 Pressure measurement value (PD) Pressure value [MPa] Figure 1: Relationship between the pressure measurement value (PD) and pressure value (e.g. : ISE20B unit MPa) Conversion formula from process data to pressure measurement value Pr = a(PD) + b Conversion formula from pressure measurement value to process data (PD) = (Pr b) / a PrPressure measurement value and pressure setting value

3 Port Air Operated Valve VPA3145/3165/3185 Series

Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3

SI Unit for Vacuum Manifold

Vendor defined parameters Tale 3-8.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

IDX-OM-W026

C 8 C 8-1 8-2 1) 2) IDF Series 8-1 81 IDX-OM-W026 9 K 9 K IDF22E/37E 9-1 ( ) 9-2 1.6Mpa AD48-8-A-X2112 10mm KQ2L10-02AS IDF22E-*-K IDF37E-*-K 0.151.6 N.O. () IDF Series 9-1 9 1 IDX-OM-W026 9 K AD48-8-A-X2112 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 SMC WEB IDF Series 9-2 9 2 IDX-OM-W026 10 L 10 L 10-1 ( ) 10-2 1.6MPaADH4000-04 IDF22E

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

EX250-SPR_eng

(Allowable SW power supply range: 19.2 V to 28.8 V) Fig. a Fig. b Summary of Product elements Double Single Double Double Double Single Double Double No. 0 2 4 6 Side A No. 5 Side A 0 2 3 5 Station Station 1 2 3 4 1 2 3 4 6 No. 1 3 5 7 Side B No. 1 4 6 Side B R O I PROCESS FIELD BUS F R P Voltage drop of max.1 V B U S PWR(V) RUN DIA BF H L H L ADDRESS + EX250 Free EX250 DIA BF PWR(V) RUN

AS

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free ow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled ow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free ow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical Controlled

AS_FS Inline

Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body Free flow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Controlled flow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 C values: Sonic conductance dm3/(sbar) Symbol b values: Critical pressure ratio Free flow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 Controlled flow 0.2 0.3 0.4 0.2 0.2 0.3 0.1

Dual Rod Cylinder/Compact Type: Slide Bearing Series CXSJ

8 !9 !9 !8 !7 !7 CXSJM10 CXSJM20 to 32 !8 !7 !9 !8 !7 !9 Piston rod B-side piston Rod cover Rod cover Head cover The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXSJ. *BLUE links will lead to purchase pages. Replacement Parts: Seal Kit Seal kit no. Contents Model Seal Kit List Description Material Note No.

S Couplers

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

Multistage Ejector (N)ZL Series

plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.)

High Vacuum L Type Valve

-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

02-cxsj-e

8 !9 !9 !8 !7 !7 CXSJM10 CXSJM20 to 32 !8 !7 !9 !8 !7 !9 Piston rod B-side piston Rod cover Rod cover Head cover The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXSJ. *BLUE links will lead to purchase pages. Replacement Parts: Seal Kit Seal kit no. Contents Model Seal Kit List Description Material Note No.

33

8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE

FQ1

Refer to "Made to Order" elements on pages 7 and 8 for details. Options Element sealing method Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Housing material A square plug set is normally used for the drain unit.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.