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9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

ZFA10 1/8 50 Large filter element surface P.276 30 Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge

Connect head cover tubing wisely with consideration of surrounding conditions. 15 Driving Direction Left Right Brake O per ating P ort Brake Release P ort Head Cover-WL Head Cover-WR Tube Part No. 1 2 3 4 5 6 Head Cover Type Head Cover-WL Head Cover-WR Tubing Side Front Side Bottom Front Side Bottom Driving Left A C E G I K Direction Right B D F H J L Note

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Interface regulator SMC 1 P 5 3 R2 R1 PE How to Order Applicable interface regulator model Reduced pressure port Solenoid valve model ARBQ4000-00-A-1 A VQ40 (plug-in type) ARBQ4000-00-B-1 B ARBQ4000-00-P-1 P ARBQ4000-00-A-5 A VQ45 (plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P SMC Pneumatics,

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: None, Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .57320

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .25269

A Dimensions COM 16 KQ2 06-M5 HLT SY Operator Setting 16 KQ2H/L07-M5 This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

Ripple -8No.PS-OME0003CN-F 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531 PSE532 PSE533 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT Weight: tab 9

This is a legacy product, and replaced byISE20B-T-M5-W, SWITCH, INSTRUMENTATION, ISE40/50/60 PRESSURE SWITCH, AA, ISE40/50/60 M5 PT VERSION, .36744 lb, ModelRated pressure rangeDisplay/Set pressure rangeWithstand pressureDisplay/Minimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--Repeat accuracyHysteresisAnalog outputAuto-shift inputDisplayDisplay

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)