Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

MXW

Yes 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire No IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

$ $ G59 G5P K59 G39 K39 G59W G5PW K59W G5BA 3-wire (NPN) IC circuit 5 V, 12 V 24 V 3-wire (PNP) Grommet 12 V 2-wire 100 V, 200 V Solid state auto switch Reed auto switch 3-wire (NPN) 2-wire Terminal conduit 12 V 3-wire (NPN) IC circuit Yes Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 12 V 2-wire 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V M9PA

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Reed auto switch Solid state auto switch 3-wire (NPN) 2-wire Terminal conduit 12 V Yes Yes Relay, PLC 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indicator) 3-wire (PNP) 24V 12 V 5 V, 12 V 2-wire Grommet 3-wire (NPN) 3-wire (PNP) M9PA*1 Water resistant (2-color indicator) M9BA*1 12 V 2-wire F59F 4-wire (NPN) G59F IC circuit 5 V, 12 V With diagnostic output (2-color

CVJ3

V 12 V Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 12 V 2-wire Relay, PLC Connector Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 12 V 2-wire With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Solid

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

switch Reed switch 12 V Relay PLC Grommet 24 V Yes 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12 V 5 V A96V A96 IC circuit Yes Grommet A93V A90V A93 A90 100 V Relay PLC 12 V 24 V 2-wire No 100 V or less IC circuit Solid state auto switches marked with are produced upon receipt of order.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ MGZ 12 V 2-wire M9B M9BV Relay, PLC 24V Grommet Yes 3-wire (NPN) 3-wire (PNP) M9NW M9NWV Diagnostic indication (2-color indication) 5 V, 12 V IC circuit MGT M9PW M9PWV Refer to page 457 for applicable auto switches other than listed above.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

(2-color indicator) 2-wire 12 V 24 V Grommet Yes Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 2-wire 12 V 3-wire (NPN equivalent) Reed auto switch 5 V Z76 IC circuit Yes Grommet 100 V Z73 IC circuit Relay, PLC 24 V 12 V 2-wire Z80 100 V or less Lead wire length symbols: 0.5 m Nil (Example) Y7BW 3 m L (Example) Y7BWL 5 m Z (Example) Y7BWZ Solid state auto switches marked

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

V IC circuit 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) M9PAV1 M9BAV1 12 V 2-wire (Non-polar) Magnetic field resistant (2-color display) 3-wire (NPN equivalent) A96 A96V 5 V IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 12 V 5 V,12 V IC circuit 100 V Relay, PLC 2-wire

Body Ported Type Vacuum Ejector ZH Series

12 One-touch One-touch One-touch 10 03 12 One-touch Screw-in One-touch 03 03 03 Screw-in Screw-in Screw-in ZH18DA11 13 13 One-touch One-touch One-touch 11 N03 13 One-touch Screw-in One-touch N03 N03 N03 Screw-in Screw-in Screw-in ZH20DA10 12 12 One-touch One-touch One-touch 10 04 12 One-touch Screw-in One-touch 03 04 04 Screw-in Screw-in Screw-in ZH20DA11 13 13 One-touch

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05 MPa 0.7 MPa Proof pressure Maximum operating pressure Minimum operating pressure Ambient and

IDX-OM-W095

V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

Common Supply Regulator

When another part is mounted, tighten with the torque of 0.60.05 Nm. -23- 12.

VFS4000-OMY0001

13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4

Standard Combinations

Recommended Tightening Torque (Nm) Air Supply Connection thread 1/8 1/4 3/8 1/2 Caution 7 to 9 12 to 14 22 to 24 28 to 30 Torque 1. Use clean air. If chemicals, organic solvents, synthetic oil or corrosive gases are included in the compressed air, parts could be damaged or they can cause a malfunction. 2.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

IC 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire Grommet Water resistant (2-color) 3-wire (NPN) With diagnostic output (2-color) Latch with diagnostic output (2-color) IC 5 V, 12 V H7LF 4-wire (NPN) : Manufactured upon receipt of order.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

Low torque Metal seal type Rotary joint Series MQR

Name Material Remarks 1 Body Stainless steel 2 Spool Special stainless steel 3 Sleeve Special stainless steel 4 Plate Aluminium 5 O-ring H-NBR 6 Retaining ring Carbon steel 7 Retaining ring Carbon steel 8 Radial bearing MQR2 to 12-M5 Components / (MQR2 to 12 M5, 2 to 12 circuits) No.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting