7 g 12 g 17 g Plug-in 3 g 6 g 11 g 16 g One-touch fitting 5.5 g 8 g 16 g 24 g Bracket weight 1.2 g 2.5 g 3.5 g 5.5 g Applicable tubing material Note 6) (One-touch fitting type) PFA, Polyolefin, Soft polyolefin, Polyurethane Replacement period 2 years or when back pressure reached 0.1 MPa When the system fails to operate normally due to clogging Packaging Antistatic double packaging
MHT MHY MHW Weight MRHQ Auto Switch Internal Circuit D-F7NV (g) Misc.
Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted Port size 01 Rc (With sub-plate) Nil Without sub-plate 1 8 Valve option Nil V Standard type For vacuum Light/Surge voltage suppressor Y For low wattage For vacuum/low power consumption Continuous duty type Nil None S With surge voltage suppressor W Z With light/surge voltage suppressor (Type D only) E For
Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth
(mm) A B C D E F G H J L Port size Bracket part no.
AXT661-12A VQ VQZ Pilot valve assembly VZ VQ11 5 G 1 VS Series VQZ100 0 VQZ200, 300 1 Function Symbol Specification DC (1.0W) AC Standard High pressure (Metal seal only) (1.0W) (1) K Electric entry (0.5W) Y Low wattage Light and surge voltage suppressor Without Electrical entry Symbol (1.0W) Latching (3) L G L LO M MO Y YO YZ YOS Grommet (DC specification) L plug connector with lead wire
f21 n. g!4) 31t1 l,loB thln 8 rtrtlo.n @itact tctoP. DritENsroNs A B c D E F G H J K lul N o P R s T u 3.43 (84 2.43 (72) 1.89 (48) 2.61 {67) 3.54 {so) 1.73 (44) 1.81 (46) 3.54 (90) 1.97 (s0) 0.79 (20) 0.35 (91 5.12 (130) 4.
7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.
Vertical Mounting Horizontal Mounting Model Selection Series MSQ Fr M=FrL H L G Load types M=FSH FS G Moment: m x 9.8 x H Allowable moment Thrust load: m x 9.8 Allowable load t : Rotation time (s) 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) Allowable kinetic energy/Rotation time Ts (Nm) . Load type . Mounting orientation .
Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.
(mm) Effective area Note 2) (mm2) Note 1) L M Weight (g) Model D 2 x applicable tubing 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 11 37 18 16 5.6 D D 13 38 18.5 22 13.1 M M 15 42.8 20.9 31 26.1 L 19 47 23 54 41.5 21 50.6 24.8 66 58.3 Note 1) D is maximum diameter.
Width across flats G MM MM R (max.)
Horizontal mounting Ceiling mounting Wall mounting mn x a Static load (m) m1 m2 m3 1 3 x FE x Z Dynamic moment M1E Static moment m1 x g x X m2 x g x X M1 M2E Dynamic moment M2E does not occur. m1 x g x Y m2 x g x Y m3 x g x Z M2 1 3 x FE x Y M3E m3 x g x X M3 Note) Regardless of the mounting orientation, dynamic moment is calculated with the formulas above. g: Gravitational acceleration
M Weight (g) Thread R(PT) Part No. Applicable tube O.D.
(mm) Weight (g) H (Hex.) Part No.
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.
MHT MHY MHW Weight MRHQ Auto Switch Internal Circuit D-F7NV (g) Misc.
Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for