Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 20, Back Flow: K (w/Backflow), Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Back Flow: K (w/Backflow), Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: E (Square embedded type pressure gauge with limit indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

REC

port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

SZ3000

One-touch fitting Refer to One-touch fitting part number information on page 38. 9 Clip SX3000-115-1 10 10 Cassette Type Manifold Series SZ3000 Manifold Exploded View 60P manifold (plug-in, flat cable type) q w U side t r u e D side y No. Parts list Part No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.

MRHQ

D20Sizes 10 and 16 updated!

RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

Rotary Gripper Series MRHQ

10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping

REC

M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.