AS_FS Inline

10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch ttings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8 (Pilot EXH) DIN terminal: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60

Compact Vacuum Ejector Series ZA

n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.

Compact Cylinder with Lock Series CLQ

L D d l m t d H B C 0.040 0.076 20 NT-02 IY-G02 20 21 7.6 16.2 1.5 0.9 M8 x 1.25 5 13 15.0 Type C 8 for axis 8 0.040 0.076 25 NT-03 IY-G03 25 25.6 9.6 20.2 1.55 1.15 M10 x 1.25 6 17 19.6 Type C 10 for axis 10 0.040 0.076 32, 40 NT-04 IY-G04 32, 40 41.6 9.6 36.2 1.55 1.15 M14 x 1.5 8 22 25.4 Type C 10 for axis 10 0.050 0.093 50, 63 NT-05 IY-G05 50, 63 50.6 13.4 44.2 2.05 1.15 M18 x 1.5 11

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

CLQ

Data Head Side Flange Style Stroke range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis style: CLQD32 4-M5 x 0.8 Cap bolt 5 Hole: 10 H10 Shaft d9 52.7 A + Stroke CL+ Stroke 20 14 10 7 32 B + Stroke 0.1 0.3 18 +0.4 +0.2 36 Double Clevis Style Stroke range Without auto switch With auto switch Bore size (mm) A

Fieldbus System

End Plate Model EX600-ED2-l EX600-ED3-l Power specifications Power connector M12 (5-pin) plug 7/8 inch (5-pin) plug Power supply (for Control/Input) 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 170 g 175 g EX600-ED3-l EX600-ED2-l Handheld

CLQ

33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 10 Series CLQ Dimensions/40

CNG

(12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300 301 to 800 20 to

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For valve weight, refer to page 2-3-10.

Compact Cylinder with Lock Series CLQ

33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 10 Series CLQ Dimensions/

Cylinder with Lock Series CNG

TW TX TY XA XB J 0.025 0.047 11 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 10 5.5 25 39 28 3.2 42 28 47.6 3 12 16 M4 x 0.7 35.8 0.025 0.047 11 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 10 5.5 30 43 33 3.2 42 28 53 3 12 20 M5 x 0.8 39.8 0.032 0.059 0.032 0.059 10 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 10 6.6 35 54.5 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28

CNG

TW TX TY XA XB J 0.025 0.047 11 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 10 5.5 25 39 28 3.2 42 28 47.6 3 12 16 M4 x 0.7 35.8 0.025 0.047 11 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 10 5.5 30 43 33 3.2 42 28 53 3 12 20 M5 x 0.8 39.8 0.032 0.059 0.032 0.059 10 54.5 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 10 6.6 35 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Low Friction Cylinders Series MQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

21

M5 x 0.8 56 9 10 40 40 60 29 103 90 M26 x 1.5 Rc1/8 62 9 10 40 40 60 29 109 96 M32 x 2 Rc1/8 67 10 11 53 53 77 36.5 125 109 Use a thin wrench when tightening the piston rod.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

MQQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 10 8 9.2 6 15.5 5 10 9.2 M5 x 0.8 4 20.5 8 16 8 9.2 8 16.5 6 16 11.5 M6 x 1.0 5 22.5 10 20 8 9.2 10 18.5 6 20 15 M8 x 1.25 5 24.5 13 25 10 11.5 12 22.5 11 25 19.6 M10 x 1.25 6 33.5 17 28 14 16 16 28.5 12 28 25.4 M14 x 1.5 8 40.5 22 Applicable bore (mm) Part no.