Refer to page 5-11-4.) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) Unrestricted Base mounted 300/50 SA Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch fitting 8 (5/16") One-touch fitting Panel mount adapter B T Output specification B E 2 PNP outputs 1 PNP output + Analog (1 to 5 V) Panel Mounting bracket
This matches the controller. (2) Check Parallel I /O configuration matches (NPN or PNP). (1) LEPY6J-50 NPN (2) 10 - 2.3 Construction 7 1 4 6 9 14 13 12 2 3 11 5 10 8 Parts list No.
Between external terminals and case 1000V AC 50/60Hz for 1 min.
0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20
Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact SMC regarding other voltages.
Specification for Option R 11 1 Safety instructions .11 1 11 2 Specifications .11 1 11 3 Power supply connection procedure .11 2 11 4 Cautions for handling the GFCI .11 3 11 5 Electric circuit .11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions .
(2 )(3 ) 1/2 ()(0[mm]) () LEHZ(J):5 50 mmsec LEHF10 :5 20 mmsec LEHF203240 :530 mmsec LEHS:5 50 mmsec () () (40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50%
3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric
(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.
-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum
Description Model Without With Air cushion Parts name Amount Air cushion 7 Slider 2pcs CVRA150 P694020-49 P694020-50 9 Tube gasket 2pcs Piston seal 2pcs 10 CVRA163 P694030-49 P694030-50 14 Spring pin 4pcs O-ring 2pcs 25 CVRA180 P694040-49 P694040-50 26 O-ring 4pcs CVRA1100 P694050-49 P694050-50 33 O-ring 2pcs Cushion seal 36 2pcs (Grease pack) (10g) 35 - Disassembly procedure and assembly
Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54
/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.
External Holding Force Internal Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa Holding force (N) 20 Holding force (N) 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 10 20 30 40 50 10 20 30 40 50 Holding point L(mm) Holding point L(mm) External hold Series MHK2 Internal hold Series MHK2 MKH2-16D MHK2-16D 50 50 Pressure 0.6MPa Pressure
. -21No.EX-OMN0036-B (3)EX600-DX E Connector pin assignment Configuration Pin number Signal name 1 Input 0 2 Input 2 3 Input 4 4 Input 6 5 Input 8 6 Input 10 7 Input 12 8 Input 14 9 NC 10 24 V (Control and input) 11 0 V (Control and input) 12 0 V (Control and input) 13 FE 14 Input 1 15 Input 3 16 Input 5 17 Input 7 18 Input 9 19 Input 11 20 Input 13 21 Input 15 22 24 V (Control and input)
J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread
/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6
Vertical Horizontal l: Load eccentricity m Mounting position m L L to 100 to 300 Maximum speed mm/s to 500 to 100 to 300 to 500 Load eccentricity lmm 100 50 200 100 50 200 100 50 200 1 2 3 4 5 6 7 8 9 10 11 12 Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction .