Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 M L2 D2 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 40 42 43 45.5 49 50 56 56.5 59.5 62.5 6 7 8 9 12 13 19 20 21 24 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02

Air Suction Filter With One-touch Fittings Series ZFB 1

Refer to pages 1315-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Misc. Release bushing One-touch fitting O-ring O-ring Body Mounting Warning 1.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

AC Servo Motor Driver (Pulse input type)

Wiring . 9 3.1 Wiring for power supply . 9 3.2 I/O signal connection for each mode . 10 3.2.1 Position control mode (Sink I/O interfaces) .10 3.2.2 Speed control mode (Sink I/O interfaces) .13 3.2.3 Torque control mode (Sink I/O interfaces) .14 3.2.4 Source I/O interfaces .15 4.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

4/5 Port Air Operated Valve SYJA3000 Series

Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operating Environment/Storage Environment Warning Warning 1. Do not use in the following environment as it will lead to a breakdown.

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

Compact manifold regulator ARM5 Series

hole U U C C P P K K 50 SMC 25 S L2=(14 x n)+13 29 55 (Max. 58) Note) U IN IN 33 14 Note) Max. dimension is the size when the knob is unlocked.

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

Air-hydro Unit

CCVS10-U1 Solenoid valve rated voltage 0 2 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz L 1 0, 1, 2, 3 2 0, 1, 2, 3 Semi-standard Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small

7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

IDX-OM-W032

13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m

Digital Flow Switch

ms 50 ms 50 ms 50 ms 12 PF3A7H Series Construction: Parts in Contact with Fluid PF3A703H/706H/712H qwerty Component Parts No.

Support Guide/11-LEFG Series

500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

MXH

moment Mp (Nm) MXH10 MXH10 0.3 0.3 60 60 50 0.25 0.25 Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.37 0.57 0.76 0.96 0.20 0 Yaw moment My (Nm) Pitch moment Mp (Nm) MXH16 MXH16 0.16 0.3 60 50 40 0.14 60 50 40 0.25 Displacement (mm) Displacement (mm) 0.12 0.2 0.1 25, 30 Stroke

0.5

Functions and Indications Page 13 Alarm Page 13 Wiring Page 14 Wiring Circuit Page 14 Operation Chart Page 15 DimensionsPage 16 Fan Type Ionizer IZF10/IZF10R Series Technical Data/Static Neutralization Performance q Installation Distance and Discharge TimePage 20 w Static Neutralization RangePage 20 How to Order Page 21 Accessories Page 22 Accessories Sold Separately Page 22 Specifications