High Vacuum L Type Valve

5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

OMR0031

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Low torque Metal seal type Rotary joint

Note 1) ISO 4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370 : General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Series H, DL, L, LL Self-align Fittings

Specifications Applicable tube material Nylon tube, Soft nylon tube, Soft copper tube (C1220T-0) 4, 6, 8, 10, 12 145psi {1.0MPa} 1,450psi {10MPa} Air JIS B 0203 (Taper pipe thread) Thread portion Nut None or with sealant JIS B 0211 Class 2 (Metric fine thread) Applicable tube O.D.

Dedicated Controller Series LC1 Uniaxial Type

controller (PLC)> Teaching box Dedicated communication cable Actuator Controller setup software Programmable logic controller (PLC) CN5 CN4 CN1 CN2 Controlled by general-purpose input/output CN3 Solenoid valve Solenoid valve Air cylinder Vacuum ejector Air gripper 51 Series LC1 Uniaxial Type with Bult-in AC Servo-driver Uniaxial Electric Actuator Dedicated Controller How to Order 1H LC1 1 1 B

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

PSxx-OMU0002CN

4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

F

E R(PT) N NPT 50 34 60 1 Port Size A B C D Model 3/4 74 115 42 50 (N)AS500 1 90 158 55 62 (N)AS600 Courtesy of Steven Engineering, Inc. !

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5

PSxx-OMU0008CN

(ZS-46-B) +(ZS-46-D) 90 -17No.PS-OMU0008CN-D <> AB (ZS-35-B) +(ZS-35-E) B A -18No.PS-OMU0008CN-D 812 Nm -19No.PS-OMU0008CN-D () TU0425( 4 2.5) -20No.PS-OMU0008CN-D FG () () No.

15

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore

240

LEH Time LEY -X5 A (LEPY10L) B 11LEFS Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 11LEJS Duty ratio = A/B x 100 [%] 70 or less 100 25A80 70 10 100 50 5 50 LEC * [Set value of pushing force] is one of the step data input to the controller. * [Continuous pushing time] is the time that the actuator can continuously

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7) Lock cable (4.5) Motor option B: With lock 8H9 ( ) depth 6 +0.036 0 13 n x 6.8 B 30 8H9 ( ) depth 6 +0.036 0 140 200 E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.

PFxx-OMJ0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !