Applicable Auto Switch Model

D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

5 Port Solenoid Valve Series VQZ1000/2000/3000

1(P), 5(R1), 3(R2) port] + + M5 x 0.8 [4(A), 2(B) port] 9 7 SJ (5.5) (8) 44.5 140 [144.4] 31.5 (30) SY 17.3 30 127 [131.4] P 1 3 5 R2 R1 1 P 3 5 R2 R1 12 21 21 B B B B B B B 20.5 (35) 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 SV A A A A A A A 31.5 63.5 [65.7] (DIN rail) SYJ 4 x 4.5 (For mounting) 34.5 SZ 12 10 8 6 4 2 0 + + + + + + + M3 x 0.5 (External pilot port) (DIN rail clamp

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

100 V, 200 V 12 V 2-wire 24 V CJ1 No 200 V or less Relay, PLC Yes Connector 24 V or less 5 V, 12 V No IC circuit CJP Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) IC circuit CJ2 5 V, 12 V Grommet 12 V 2-wire CM2 Connector 3-wire (NPN) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 3-wire (PNP) 24 V CG1 Courtesy of Steven

CQM

V, 12 V IC circuit Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V F79W F7PW J79W F7BA F9NWV F9PWV F9BWV F9NW F9PW F9BW F9BA IC circuit Relay, PLC Yes 5 V, 12 V Diagnostic indication (2-color indication) F7BWV Grommet Water resistant (2-color indication) 12 V 2-wire F7BAV P5DW Magnetic field resistant (2-color indication) 5 V, 12 V Solid state switches marked with a symbol

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS

Fieldbus system PROFINET compatible SI Unit

Signal name 1 24 V (Output) 2 0 V (Output) 3 24 V (Control and input) 4 0 V (Control and input) 5 F.E. (2) EX600-ED3PWR IN: 7/8 inch 5-pin Plug Configuration Pin No. Signal name 1 0 V (Output) 2 0 V (Control and input) 3 F.E. 4 24 V (Control and input) 5 24 V (Output) (3) EX600-ED4PWR IN: M12 4-pin Plug A code PWR OUT: M12 5-pin Socket A code Configuration Pin No.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

SFOD-OMT0011CN

(3) Para protec a) Profaile View (V) 4.1 (1-1-2) View (V) Profaile b) Para protec Edit c) OK d) Download , e) 32 No.SFOD-OMT0011CN-A 4.3 PLC (: (1) 2 1-11-2 (1-1) a) View (V) 4.1 (1-1-2) View (V) b) Step No.Movement mode , Movement mode c) (0,0) (No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LAT Applicable Stroke Table*4 V: Standard Model Stroke [mm] LZ 200 300 400 500 600 700 800 900 1000 1200 1500 LEJS40 V V V V V V V V V V LEJS63 V V V V V V V V V V LC3F2 *4 Please consult with SMC for non-standard strokes as they are produced as special orders. For auto switches, refer to pages 142 to 144.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

1.1

[Piping adapter] AP IDF Size Applicable Thermo-cooler Thread type and port size Symbol Material Quantity per set Female side B Male side A HRG001HRG002HRG005HRG010HRG015NPT 1/2 R 1/2 601 Copper alloy 2 HRG010HRG015603 NPT 3/4 R 3/4 Note) Refer to page 33 for dimensions.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

SFOD-OMT0012

[How to JOG] a) Change the mode to Remote mode in the main window. b) From the main window select View (V), select the Teaching window and select the JOG tab. Refer to section "4.1 (1-1-2) View (V)" for how to display the Teaching window.

PSxx-OMM0006CN

X B(ZS-24-B) M45L B -16No.PS-OMM0006CN-E M8(3) (ZS-35-C/ZS-35-D) +(ZS-35-F/ZS-35-G) () ZS-35-C/D -17No.PS-OMM0006CN-E 79 Nm M5 (12mm) 1 2 1) 0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -18No.PS-OMM0006CN-E () TU0425 ( 4 2.5) -19No.PS-OMM0006CN-E (M8(3)22) Z/ISE40A--DC(+) -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -S/-R () NPN 2

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up