SMC Corporation of America
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D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Nil S n Stainless steel cylinder Auto switch type/Band mount type Seal material R V NBR FKM B H7BAL Without auto switch (built-in magnet) D-H7BAL (water resistant) Available only with band mount type. Head cover port position Nil R Perpendicular to axis Axial direction Auto switch specifications Mounting bracket part numbers Refer to pages 15 through 17 for auto switch related items.

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1

C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Grease application (Seal band part) Motor option Nil With Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable

L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Cv b Cv 1 2 (P A) 2 3 (A R) Model Flow characteristics Note) Type of actuation Port size Weight (g) Base mounted VZ512 VZ522 VZ514 VZ524 VZ514 VZ524 N.C.

indication (2-color indicator) 2-wire 3-wire (PNP) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V,12 V 3-wire IC circuit E76A 5 V (NPN equivalent) Yes Grommet E73A E80A 24 V 12 V 5 V,12 V 100 V 2-wire Relay, PLC IC circuit N0 100 V or less Lead wire length symbols: 0.5 mNil (Example) M5BW 3 m L (Example) M5BWL 5 m Z (Example) M5BWZ Solid state auto switches marked with are produced

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E