VFS

Nil N NPT Rc Body type Electrical entry Thread type O: Plug-in type sub-plate F: Plug-in type conduit terminal T NPTF F G Option 1 10 F Plug-in VFS6 5 0 Z 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D Non plug-in VFS6 Z 10 1 5 0 1 Option Nil Z None With light

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

7

T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Tie-rod Type Hydraulic Cylinder

trunnion type: CHAT Z + 1/2 stroke 2 x Rc P Cushion adjustment screw 4 x J GA TT Air release GB T V Air release Width across flats G MM R (max.)

SYJ300/500/700

SYJ500-9-1 V111(T)Description Sub-plate Pilot valve No. u i No. q w e r t y VT VP VG How to Order Connector Assemby for L/M Plug Connector VP How to Order Pilot Valve Assembly S070 V111 5 G SY100-30-4AFor DC: VQ SY100-30-1ALight/Surge voltage suppressor Coil specifications For 100 VAC: VKF Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage

Electric Actuator Triple Axis P&P Unit

T nuts provided by P/A.

10

3 o w e t !2 !7 r !5 CJ1 CJP CJ2 JCM CM2 32 CM3 CG1 CG3 JMB MB MB MB1 MBW125 CA2 Component Parts CS1 No. Description Material Qty Note 1 Rod cover Aluminum die-cast 2 Trivalent chromated No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Air Slide Table

5 10 15 0 5 10 15 Load [N] Load [N] Load [N] (Plate size: t = 8) Lr = 90 mm MXQ12( )-Z, MXQ8B-Z A C MXQ12( )-Z, MXQ8B-Z A C MXQ12( )-Z, MXQ8B-Z A C 0.012 0.200 0.007 ST 100 ST 100 0.006 0.010 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 10 to 30 ST 40, 50 0.150 0.005 0.008 ST 50, 75 0.004 ST 75, 100 ST 75 0.006 0.100 ST 30, 40 0.003 0.004 0.002 0.050 ST 100

CY1

5 u i !0 y !7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

CM2

5 !6 !7 !8 !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 !

CM2

#5, #19 CM2G40SCM240A, #12 SCM240A, #12, #5 SCM240A, #12, #5, #19 Spring extend CM2G20SCM220A, #11 SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42 Series CM2 Single Clevis (C) CM2C Bore size Stroke S T (mm) N P Bore U E

ISA2

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 Terminal block box LED level meter End plate R End plate L 3 0 3 0 3 0 ZSE ISE P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial PSE 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge Z I SE3 12 12 21 Bracket PS 24 5.5 SUP port L3 6.5 Rc, NPT, G 1/8 Z I SE1 2 36 24 Courtesy

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Secondary Batteries

(Normally open) B Electrical entry Thread type D DIN terminal Rc Nil G F NPT N Light/Surge voltage suppressor NPTF T Nil Z None With light/surge voltage suppressor Port size 04 06 10 1 2 3 4 1 *Specifications and dimensions for the 90-series are the same as standard products. 9 3 Port Solenoid Valve Direct Operated Poppet Type Rubber Seal 90-VT317 Series How to Order 317 02 5 D Z V T 90 Series

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

light/surge voltage suppressor With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) S Z T Nil S Z R U Power saving circuit is not available for W type.