Ejector Valve Unit, Series ZYY/ZYX

specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000 Connector type Rated voltage Output specifications (Vacuum switch) DC specification NPN open collector, single output Analog, no output, 3 turn setting 5 6 V S R 24VDC 12VDC

PFA/PFW

in X, Y, Z directions for 2 hours each Vibration resistance Impact resistance Weight Enclosure Piping port size 490m/s in X, Y, Z directions, 3 times each 250g (8.8oz) (not including lead wires) Equivalent to IP65 1/8, 1/4 Note 1) The output functions (2 outputs OUT1 and OUT2) operate only with respect to the real-time flow rate display, and do not operate with respect to the accumulated

Heavy Duty Stopper Cylinder

5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

For 115VAC and 230VAC, the allowable voltage fluctuation will be 15% to 5% of rated voltage. The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.

End Lock Cylinder Series CBG1

Lead wire length (m) Load voltage Auto switch models Indicator light Type Special function Wiring (output) Electrical entry Applicable bore sizes Applicable loads 0.5 (Nil) 3 (L) 5 (Z) None (N) DC AC 20 to 63 20 to 100 3 wire (NPN equiv.)

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Free-Mounting Cylinder with Air Cushion Series CU

5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

4-channel Flow Monitor ( compatible)

ms or less, 0 to variable from 60 s/0.01 s increments Response time 4 3 ms or less Hysteresis Variable from zero 5 Protection Over current protection Input type Voltage input: DC1 to 5 V (Input impedance: 1 M) Sensor input Number of inputs 4 input Connection method e-CON Protection Over voltage protection (up to a voltage of 26.4 VDC) Display type LCD Number of displays 3 (1 main display

10

) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ 2 Water resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

5 !

Compact Cylinder

H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series Bore Size Standard (Through-hole): JCQ

VK3000

port body ported: VK3120 5 port base mounted: VK3140 Blanking plate assembly: VK3000-7-1A M3 x 26 Round head combination screw M3 x 26 Round head combination screw M3 x 8 Round head combination screw Blanking plate Manifold gasket Manifold gasket Applicable base VK3000-9-1 Sub-plate VV5K3-40(-Q) VV5K3-(S)41(-Q) Manifold base VV5K3-(S)42(-Q) Applicable base VV5K3-20(-Q) VV5K3-21(-Q) Manifold

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 255 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A,

CQM

J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single

VEX1

VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Turntable Cylinder Series MGT

S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VK3000

Note 1) Remove the plug if changing the 3 port valve to a 5 port valve. Note 2) In case a 3 port valve VK300 is mounted on the manifold base for a 5 port valve VK3000, switching type is normally closed (N.C.). If requiring a normally open type (N.O.), plug the A port on the 5 port valve. Note 3) A port of a 3 port valve for base mounted type becomes A port of a 5 port valve.

VK300

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.