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o to 12 stations 3-port Base Mounted voz EIE 5 t l f f i l Svmbol J Pilot valve specifications ' DC r'o lages only conneclofwilh 300mm lead wire 'consu I S[,4c for availabe voiaqes. vv3ez p s dffi c s",i"" J I I ffir | | % H DIN tail mounting wilhour rail 3-port Body Ported Valve One-touch frltrnq for 5/32' O n t o u c h f t n g f o f I / 4 ' One touch f tt no for 5/l6' One-touch lllting

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

JXCx-OMU0026

JXC-OMU0026 Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 (3.438) 249/77 (3.234) 246/53 (4.642) 243/48 (5.063) 242/39 (6.205) 254/43 (5.907) Max. speed [mm/s] 80 80 100 100 120 120 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 8 8 8 9 9 9 Model

Electric Actuators

Speed [mm/s] LEPY10(L) (Basic/Compact) Horizontal Vertical 5.5 5.5 Lead 5 (LEPY10K) 4.4 4.4 Lead 5 (LEPY10K) Work load [lb] Work load [lb] 3.3 3.3 Lead 10 (LEPY10J) 2.2 2.2 Lead 10 (LEPY10J) 1.1 1.1 0 350 300 0 50 100 150 0 350 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] 3 Model Selection Series LEPY Force Conversion Graph (Guide) LEPY LEPS LECP6 LECP1 Model Selection LEPY6

Valve Single Unit

S 5 VDC Mixed M Common specifications for the valve must correspond with common specifications for the manifold.

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c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

). 5 15 5.

JXCx-OMT0001CN

) (5.907) mm/s 80 80 100 100 120 120 [mm/s] () 5 5 5 5 5 5 [mm/s] () 8 8 8 9 9 9 -110No.JXC-OMT0001CN-C LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm

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rc 1o Indcale thewnnO spec l.ar ons n the specilicalion sheet Note 4) F.r exlenal pr ol oplDn, F ndca|elhe qter.a p otsp6licaton R fordre appricabre var@s as @11 Note 5) The o!

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Table of Contents

8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy

2/3 Port Valve

5 !

LEC-OM02904

PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX31 S N 402 R 1 G1 * F 403 N 2 GS E 502 F 3 DN 503 4 WN 702 5 703 6 7 8 B J JSX31 1 Only applicable to rated voltage symbols 5 and 6 CS Conduit Listed Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX21 S N 301 R 1 CS * F 302 N 2 E 303 F 3 402 4 403 5 502 6 503 7 702 8 703 B J JSX21 Glossary of Terms Series

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.