Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

Low Maintenance Filter Series FN1

q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

VCB

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

Rotary Actuator

2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1 q (MIW8) Carbon steel Piston assembly Clip !2 w (MIW12 to 32) Heat treatment/Special treatment Carbon steel Carbon steel Finger R shape snap ring !3 e Hard anodized Aluminium alloy NBR Cover Piston seal !4 r White anodized Aluminium alloy NBR Cap (W) Rod seal !5 t Heat treatment (MIW8 to 20) Stainless steel NBR Cam Gasket !6 y (MIW8 ...

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

y r !

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

R.

rep-modular-e

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No. Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Micro-Mist Separator with Prefilter Series AMH

AMH550 AMH150 I Air pressure 0.3MPa ",0.06 '" 0.06 a. ::;; Inlet air pressure 0.3MPa r-a. /;57o.7MPa ::;; ~ / // 0.5MPa ~ ./' 0.7MPa Q) ~~V a. ~ 0.04 ~O.O4 VI ~ ~ a. 0.3MPa Q; V ~ 8 002 ~ V;.;.x.fIow Ii~::---X 0.7MPa 8 002 ax fIoW "l . . e ~ L . __ 0.5MPa --L ___ -. _ -'0.7M,a "" ---:=. . ~!"}.