After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA
9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.
8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4
(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.
06 10 14 B 3 4 1B 1 8 Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 4 B 1 B 1 2 20 2B IN-OUT reversal direction -T Element service indicator Option HA AT ID AMG AFF AM Misc. 14-20-31 3 Series AMH Flow Characteristics/Select the model taking the max. flow capacity into Element oil saturation Initial condition Note) Compressed air over max. flow line in the table below may not meet the specifications
(LJ1S Series only) C D Running accuracy Model C plane to A plane D plane to B plane LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 0.07 or less 0.03 or less 0.09 or less 0.12 or less 0.1 or less 0.1 or less 0.07 or less 0.06 or less 0.03 or less 0.015 or less 0.1 or less 0.1 or less B A Actuator control Programming from a PC Programming and start-up: easy programming is possible by means of the
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
Common exhaust(pilot and main valve)type Pilot exhaust Not required Lubrication Free Mounting position 150/30 Impact / Vibration resistance m/s2 Dust proof Protection structure Base mounted type Solenoid Specifications Grommet (G), E(H), L type plug connector (L), M type plug connector (M) Electrical entry Coil rated voltage V DC 24, 12, 6, 5, 3 Internal pilot AC 50/60Hz 100, 110, 200, 220
PneuAlpha Hardware Manual PneuAlpha Manual number : ECC-PNAL-HARD-B Manual revision : G Date : August 1999 i PneuAlpha This manual is written to be used by trained and competent personnel for installation of this equipment as dened by the European directives for machinery, low voltage and EMC.
/30 m/s2 ZCU Enclosure (2) Dust proof Note 1) Based on JIS B 8374-1981 dynamic performance test.
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.
Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before
8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.
175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30
175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30
Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.
) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication
8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4
W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 [ ]: Values for 5 mm stroke with 32 < >: Values for