Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

3 Port Air Operated Valve Series SYJA300 1

F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

IDX-OM-W026

314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R GFCI R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11

IDX-OM-W029

1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E

IDX-OM-U010

Note 2: Air flow capacity converted by the compressor intake condition [32C, atmospheric pressure, and 75% relative humidity]. Note 3: Do not use this product with continuous voltage fluctuations. Note 4: These values are reference values under rated conditions and are not guaranteed. Do not use these values for the thermal set values, etc.

Table of Contents - Tubing

INF-19 SMC Corporation of America 10100 SMC Blvd., Noblesville, IN 46060 www.smcusa.com SMC Pneumatics (Canada) Ltd. www.pneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2011 SMC Corporation of America, All Rights Reserved.

5 Port Air Operated Valve

3/8 10.0 [8.7] 0.48 [0.46] 3.0 [2.4] 8.3 0.40 2.2 Exhaust center 3 position 354 9.2 [3.0] 0.50 [0.49] 2.6 [0.85] 6.1 0.35 1.6 Pressure center Note 1) [ ]: Normal position Note 2) Values without bracket 1500 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Construction: Body Ported 2 position single VFA1000 VFA3000, 5000 Symbol 2 position single VFA1000 t qe r q e

MP2 - Double detatchable head side clevis style (D)

MP2 Double detatchable head side clevis style (D) XD + Stroke A UB P + Stroke 2-EE MR MAX KK MM B CD (PIN) TH LR CB E WF LF + Stroke F Bore Size (in) MM KK A B CB CD E EE F LF+ LR MR P+ TH UB WF XD+ 500 (5") 1.000 3/4-16 1.13 1.500 1.280 .750 5.50 1/2 NPT .63 4.50 .94 .95 2.88 2.75 2.500 1.38 7.75 600 (6") 1.375 1-14 1.63 2.000 1.530 1.000 6.50 3/4 NPT .75 5.00 1.31 1.32 3.13 3.25 3.000 1.63

VNH

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

ZP3

B C D E Y q Pad dia.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Title not found

E2l6lcr ava alr e a!1. svrlclrs Nole)Nol r.tat n! avaiab e 20mm lo 6.lmm cn y i 6-,,cylinder stroke (mm) Nole) Sriqe act n!

CJ2Q

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

Title not found

E!

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( . o N t r a P T ) M ( H ) . x e H ( L g n i t n u o M e l o h M 6 1 / 3 M 0 0 5 0 E 2 Q K 1 X 4 1 M 7 1 4 3 5 1 5 . 6 1 5 . 3 0 3 4 / 1 M 0 0 7 0 E 2 Q K 1 X 4 1 M 7 1 5 . 4 3 5 1 7 1 6 . 4 0 3 6 1 / 5 M 0 0 9 0 E 2 Q K 1 X 6 1 M 9 1 8 3 7 1 5 . 8 1 6 8 4 8 / 3 M 0 0 1 1 E 2 Q K 1 X 0 2 M 4 2 5 . 2 4 1 2 1 2 7 2 6 2 / 1 M 0 0 3 1

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.