High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

MB1

212 Rear flange type B FY Bore size (mm) Stroke range B FD FT FX FY FZ ZZ 32 40 50 63 80 100 79 90 110 120 153 178 to 500 to 500 to 600 to 600 to 750 to 750 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 32 36 45 50 63 75 141 145 164 164 202 202 64 72 90 100 126 150 FX FZ FT ZZ + Stroke Without air cushion Single clevis type/(C) Bore size (mm) ZZ Z Port Cushion valve 32 40 50, 63 80

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 R 200/230VAC (50/60Hz) 2 Axial entry Right entry Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 4.8 200 5.6 300 6.4 400 7.1 500 7.9 5 to 40 (with no condensation) 10 600 mm kg C kg mm/s mm Standard stroke Stokes other than the standard strokes on the left are available by special order.

VFR

valve model Nil Symbol Electrical entry Symbol Rated voltage 1 100 VAC, 50/60 Hz VFR30 VFR31 VFR34 Non-locking push type A (Extended) VFR30 VFR31 F Nil A Plug-in 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 1 G GS Grommet Locking type B (Tool required) B 5 24 VDC E EZ Grommet terminal 6 12 VDC Locking type C (Lever) C 7 240 VAC, 50/60 Hz Conduit terminal T TZ

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 With 1 pc. 70 75 80 85 90 10 With 2 pcs.

energy saving effect

Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability 0.1C Temp

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

connector LO 110 VAC 50/60Hz 5000mm 50 3 With lead wire M [115 VAC 50/60Hz] M plug connector Without lead wire MN 220 VAC 50/60Hz 4 Without connector MO [230 VAC 50/60Hz] Without connector cable WO M8 connector For type "W", DC voltage is only available.

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

LEC-OM02704CN

[0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03 8 (16)10 (12)([9][0]) [9][0] [0][0] EMGLSPLSN OFF ON/OFF 1EA5 4 [0][3] (DO) 1EA5 4 [1][0] EMGLSPLSN

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

A F Q GB K With rod boot LH W W D D e E LY V H1 Width across flats B1 8 f l LT KA Width across flats h + l T Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX C H 4-LD With rod boot on both sides LS + Stroke ZZ + 2 strokes ZZ + 2 l + 2 stroke B Bore size (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250 306

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1 1 G S J59W CDVRA1 With auto switch Size Cushion Built-in magnet Auto switch With solenoid valve Nil C None With cushion For the applicable auto switch model, refer to the table below. 50 63 80 100 Mounting style Shaft type

39

90 105 120 135 15 30 G 45 NPT 60 Rc 75 90 105 120 135 A015 C S CKZT Arm 63 Power clamp cylinder European type Mounting hole D1 D2 Symbol S B 6 9 Bore size 8 10.2 50 63 50 Equivalent 63 Equivalent Arm mounting position Center Offset A015 A045 D1 D2 Offset 15 C Offset 45 Right D1 D2 Arm mounted R Left L D1 D2 13 Series CKZ3T Cylinder Specifications Bore size 50 Equivalent 63 Equivalent Action

RHC

0.09 (kg/50 st) Cylinder stroke 600 (st) 2.44 + 0.09 x (600 500)/50 = 2.62 kg Accessory Mounting nut Rod end nut 30 30 d d D D C C H H B B Material: Carbon steel Material: Carbon steel B Part no.

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

Series VQ Base Mounted Metal Seal/Rubber Seal

Standard 110V AC (50/60Hz) VQ4 220V AC (50/60Hz) 24V DC 12V DC (1.5W) High pressure H VQZ Low wattage (0.5W) Y Note) The C kit is applicable to 200/220V AC. Contact SMC for other kits. VQD Note 1) Refer to p1.10-168 for AC.

ISO Standard Hydraulic Cylinder

96.9 47 20 M16 x 1.5 16 M42 x 2 101 168 132.5 50 130 140 220 15 275 56 130 56 72 10 50 91 19 52 67 40 3/4 54 82 350 CHSG Series ISO Standed Hydraulic Cylinder 16 MPa Accessory (Option) Rod end nut 30 d CHQ CHK D C CHN H B CHM CHS CHS Material: Carbon steel Part no.