VDW Series Enter together in order, counting from station 1 on the D side.
Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw
(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.
Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 20mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Mounting: Axial Foot, Bore Size: 32mm, Stroke: 200mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in Magnet, Mounting: Basic, Female Thread on Rod Cover, Direct Mounting, Bore Size: 20mm, Port Thread: Rc1/8, Stroke: 200mm, Rod End Thread: Male Thread, Mounting Nut: None, Rod End Bracket: No Bracket, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø63, Port Thread: Rc, Stroke: 200mm, Rod Boot and Cushion: w/o Rod Boot (w/Standard Air Cushion), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø32, Port Thread: Rc, Stroke: 200mm, Rod Boot and Cushion: w/o Rod Boot (w/Standard Air Cushion), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Bore Size: 40mm, Stroke: 200mm, Option: w/o Rod Boot; Air Cushion on Both Sides, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Bore Size: 50mm, Stroke: 200mm, Option: w/o Rod Boot; Air Cushion on Both Sides, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 16mm, Port Thread: M Thread (ø16) Rc Threads (ø25, ø40), Stroke: 200mm, Stroke Adjustment Unit: Left, Right Side w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Stroke: 200mm, Stroke Adjusting Unit: Left: w/o Unit; Right: w/o Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 16mm, Port Thread: Rc: ø25, ø40, ø63/M Thread: ø16, Stroke: 200mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Style: A (Short Type-Rubber Cushion), Bore Size: 20mm, Port Thread: Rc: ø25, ø40, ø50, ø63/M Thread: ø16, Stroke: 200mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)