Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

CL

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Table of Contents

L1 L2 M D I.D.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

/M5W/M5TL D-E7A/E80A D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

PFxx-OMS0001CN

-35No.PF-OMS0001CN-A d.

EXxx-OMV0017-D

Fixed at "Manual". b) Diagnostic allocation Advanced Advanced Available Fixed at "Advanced". c) DA refresh time 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s Available (sec) Output action when upper communication is disconnected. d) Clear / Hold / Individual Clear Available Timing of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000 msec 500 msec Available e) System

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

REC

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

0.02 End plate (PBT) (UL94-V0) End plate (PBT) (UL94-V0) 0.01 0.005 50 100 200 500 1000 2000 5000 10 20 Sound absorbing material (PVF) Sound absorbing material (PVF) Air flow (l/min (ANR)) Noise Level (Initial conditions) Case (PBT) (UL94-V0) Case (PBT) (UL94-V0) Hexagonal flats D Hexagonal flats D AN202 to 402 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance:

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 2 1 2 1 Signal name Yellow White Orange Blue 1 2 3 4 1 2 3 4 4 3 4 3 Plug connector pin arrangement D-coded Plug connector pin arrangement D-coded Metal parts Metal parts Shield Connections (Straight cable) EX9-AC 005 EN-PAPA (With angle connector on both sides (Plug/Plug)) 36.3 L Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm 30.8 6.5 Metal

VQ7-6/7-8

-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector (M12) (L approx. 500) R1 R2 P 42.5 42.5 42.5 42.5 2-6.5 Mounting hole Indicator light 2-6.5

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

MQQ

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x