Speed Controller: Standard Type Series AS Large Flow In-line Type 1

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Precision reference points on body and fingers are standard., GRIPPER, 180 DEGREE, ACTUATOR, MHW2 GRIPPER, ANGULAR, HE, 20MM MHW2 DBL ACT W/AUTO-SW, .72759 lb, ModelBore sizeGripping moment ?Over length L (mm)Mass ( N?m)LMHY2-20D201.10106320

Precision reference points on body and fingers are standard., GRIPPER, 180 DEGREE, ACTUATOR, MHW2 GRIPPER, ANGULAR, GE, 16MM MHY2 DBL ACT W/AUTO-SW, 4.19591 lb, ModelBore sizeGripping moment ?Over length L (mm)Mass ( N?m)LMHY2-16D160.5484150

Precision reference points on body and fingers are standard., GRIPPER, 180 DEGREE, ACTUATOR, MHW2 GRIPPER, ANGULAR, IE, 25MM MHW2 DBL ACT W/AUTO-SW, .95700 lb, ModelBore sizeGripping moment ?Over length L (mm)Mass ( N?m)LMHY2-25D252.28131560

HRX-OM-W060

10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120 140 160 180

HRX-OM-Y098

CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) Pump capacity Maximum flow rate L/min 120 16 *12 130 16 *12 180

HRX-OM-X037

: Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.0 1 6.0 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) Pump capacity 13 Maximum flow rate L/min 120 16 *12 130 16 *12 180

HRX-OM-X084

screen No.10 screen Unused OFF EXTCtrl No.11 screen Unused 0.0 EXTOFSET No.12 screen Unused 35.0 EXTHI.TEMPLIMIT No.13 screen Unused 15.0 EXTLO.TEMPLIMIT 5.5.3 No.14 screen Unused 10 EXTTIME SEC No.15 screen TEMP READY bandwidth upper limit 1.0 0.1 to 9.9 READYH.BAND No.16 screen TEMP READY bandwidth lower limit -1.0 -9.9 to -0.1 READYL.BAND No.17 screen TEMP READY stability time 180

HRX-OM-W002

pressure rise alarm / / / / Ambient temperature *3 212 TEMP READY Band width Lower Limit 050 EASY mode ON -10 100 Unused*3 HIPRS WAKE EASY MODE AMB TEMP READY LBAND AMB LOTEMP Detection time of circulating fluid discharge pressure rise alarm Pressure of higher pressu rerefrigerant circuit 000 / / / / / TEMP READY stabilization time 5 resetKey click sound ARN ON Switch leakage alarm 5 180

HRX-OM-X071

screen No.10 screen Unused OFF EXTCtrl No.11 screen Unused 0.0 EXTOFSET No.12 screen Unused 35.0 EXTHI.TMPLIMIT No.13 screen Unused 10.0 EXTLO.TMPLIMIT 5.5.3 No.14 screen Unused 10 EXTTIME SEC No.15 screen TEMP READY bandwidth upper limit 1.0 0.1 to 9.9 READYH.BAND No.16 screen TEMP READY bandwidth lower limit -1.0 -9.9 to -0.1 READYL.BAND No.17 screen TEMP READY stability time 180

HRX-OM-T004

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL19 communication error alarm to notify the error. This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec.

DOC1003626

Passage of 180 sec. Excess at no 60 sec. Broken communication wire monitoring time. o r coming 60 sec. off AL34 Communication alarm is generated.

HRX-OM-R028

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL19 communication error alarm to notify the error. This product Your system Write or read Monitoring time 60 sec. Write or read Monitoring time 60 sec. Passage of 180 sec.

HRX-OM-W069

Time for monitoring the communication alarm 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL34 communication error alarm to notify the error. This product Your system Write or read Monitoring time 60 sec. Write or read Monitoring time 60 sec. Passage of 180 sec.

HRX-OM-Z015

Write or read Monitoring time 60 sec. 180 sec passed No communication monitoring time 60 sec. Broken wire exceeded. o r Broken wire 60 sec. AL19 Communication alarm is generated.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/ AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55

7ND9071en

Temperature range -40 to +82 C / -40 to +180 F. K1S option includes a thread nipple 1/4"NPT to G1/4" between filter regulator and positioner which is suitable with ND9100 and ND9400 positioner and with option A1 (G1/4 AIR CONNECTION). Supply air connector in the filter regulator is female 1/4". Not applicable with 5.sign "F" and "P".

CRB2-OM00001

Part Material Note 1 Body (A) Aluminum Alloy White 2 Body (B) Aluminum Alloy White 3 Vane Shaft Carbon Steel (NBR) 4 Stopper Resin For 270 5 Stopper Resin For 180 6 Bearing Bearing Steel 7 Back-up Ring Stainless Steel 8 Hexagon Socket Head Cap Screw Stainless Steel Special bolt 9 O-ring NBR 10 O-ring NBR 11 Stopper Packing NBR 12 Parallel Key Carbon Steel 3 2-2Double Vane Type No.

JXCx-OMT0032CN

181 (1) 178 bit1 Bit0 0 0 0 1 1 0 (2) 0(OFF)1(ON)1(ON)CN2SWON (3) 0(OFF)1(ON)1(ON)CN2SWON (4) 0(OFF)1(ON)(LEC)1(ON)0(OFF) (5)() IDON(1)IDOFF(0) bit 7 6 5 4 3 2 1 0 179 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 180 ID1ID8 (6) (LEC)IDID2 11201212 bit 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 40 - 13.