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0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5,298 5,362 URL https://www.smcworld.com

SX91 SX92 SX090 Valve construction 2-port direct operated poppet valve 2-port direct operated poppet valve 3-port direct operated poppet valve Type of actuation Normally closed Universal Universal Fluid*1 Air, Nitrogen Operating pressure range [MPa] 100 kPa to 0.2 Proof pressure [MPa] 0.6 Ambient and fluid temperatures [C]*2 0 to 50 C [dm3/(sbar)] 0.25 0.12 0.5 Cv 0.07 0.032 0.14 b 0.25

mm lead wire H Grommet, 600 mm lead wire L L type connector w/ plug and 300 mm lead wire LO L type connector w/o plug and lead wire LN L type connector with plug and pins M M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation

Recommended Sonic Conductance and Solenoid Valves (Reference) C [dm3/(sbar)] ZH10--X185 1.48 or more ZH20--X185 3.12 or more ZH30--X185 5.92 or more ZH40--X185 11.08 or more Model VQZ200 VP300 VP500 VP700 Solenoid valve (Reference) Sonic conductance C [dm3/(sbar)]: 1.7 Sonic conductance C [dm3/(sbar)]: 4.2 Sonic conductance C [dm3/(sbar)]: 8.9 Sonic conductance C [dm3/(sbar)]: 15.3 791 C

Fixed end Maximum Operating Pressure How to Order Inch size TID01 8 2.0 1.8 Max. operating pressure MPa TID07 Length per roll 1.6 Symbol 8 16 Length 8 m (25 ft) roll 16 m (50 ft) roll TID01/TID05/TID11 1.4 1.2 TID13 1.0 Tubing model 0.8 0.6 0.4 0.2 0.0 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Operating temperature C 510 TL/TIL/TD/TID Series Applicable Fluid List Chemical

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

IDX-OM-W017-E / Series IDFA3E-23-A,C IDFA4E-23-A,C,L,R,T,V IDFA6E-23-A,C,K,L,R,T,V IDFA8E-23-A,C,K,L,R,T,V IDFA11E-23-A,C,K,L,R,T,V IDFA15E1-23-A,C,K,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO 4414: Pneumatic fluid power General rules and safety requirements for systems and

25, 32, 40, 50, 63 Sine Rodless Cylinder Series 12-REA How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Lubrication Standard stroke (mm) 12-REA25 12-REA32 25 32 40 Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 200, 250, 300

M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions

Series 12-REA Sine rodless cylinder 25, 32, 40, 50, 63 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 REA 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Standard stroke (mm) Lubrication Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-REA25 12-REA32 25 32 40 200, 250, 300

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

SPEEDCON connector wiring method is explained below. (1) Align the mark B on the metal bracket of the cable side connector (plug/socket) with the mark A. (2) Align the mark C on the unit and insert the connector into the unit vertically.