BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

ZSE30A(F)/ISE30A

Current output Load impedance Maximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green) 2% F.S. 1 digit (Ambient temperature of 25 3C) Lights up when switch output is turned ON.

LFE-OMY0008

NPT)1 3638 Nm NG NG 19 No.LFE*-OMY0008 NG IN 5 (5D)(68 ) 20 No.LFE*-OMY0008 FG 3 1 DC() 4 2 2 OUT2 3 DC() 1 4 OUT1 3 4 2 1 DC() 2 OUT2 3 DC() 1 4 OUT1 LFE M12 21 No.LFE*-OMY0008 NPN2 LFEA PNP2 LFEB DC() OUT1 OUT2 DC() OUT1 DC24V DC24V DC() DC() Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN LFEC NPN LFED DC() OUT1 OUT2 DC() OUT1 OUT2 DC24V DC24V DC() DC() Max.28 V80 mA 1 V 420 mA 600

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d Flow direction: Left to right Flow direction: Right to left + Pressure Control Equipment Nil Y Knob e

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d Flow direction: Left to right Flow direction: Right to left + Pressure Control Equipment Nil Y Knob e

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

CJ1

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

AMP

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2,

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02 03 04 06 10 12 14 20 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 R NPT Nil N 200 300 400 500 600

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: E (Push-turn Locking Lever Type), Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: B (PNP Open Collector), Unit: P (w/Unit Switching Function, Initial Value psi)

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: E (Push-turn Locking Lever Type), Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: B (PNP Open Collector)

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: E (Push-turn Locking Lever Type), Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector)